Ice and abrasive particles : an alternative CMP polishing technique
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9570 |
| _version_ | 1811079326408376320 |
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| author | Born, Melanie P. (Melanie Providencia), 1975- |
| author2 | Nam P. Suh. |
| author_facet | Nam P. Suh. Born, Melanie P. (Melanie Providencia), 1975- |
| author_sort | Born, Melanie P. (Melanie Providencia), 1975- |
| collection | MIT |
| description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. |
| first_indexed | 2024-09-23T11:13:25Z |
| format | Thesis |
| id | mit-1721.1/9570 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:13:25Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/95702020-04-02T21:07:41Z Ice and abrasive particles : an alternative CMP polishing technique Born, Melanie P. (Melanie Providencia), 1975- Nam P. Suh. Massachusetts Institute of Technology. Department of Mechanical Engineering Mechanical Engineering Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. Includes bibliographical references (p. 45-46). by Melanie P. Born. S.B. 2005-08-19T18:37:18Z 2005-08-19T18:37:18Z 1998 1998 Thesis http://hdl.handle.net/1721.1/9570 42004628 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 46 p. 3069723 bytes 3069478 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Born, Melanie P. (Melanie Providencia), 1975- Ice and abrasive particles : an alternative CMP polishing technique |
| title | Ice and abrasive particles : an alternative CMP polishing technique |
| title_full | Ice and abrasive particles : an alternative CMP polishing technique |
| title_fullStr | Ice and abrasive particles : an alternative CMP polishing technique |
| title_full_unstemmed | Ice and abrasive particles : an alternative CMP polishing technique |
| title_short | Ice and abrasive particles : an alternative CMP polishing technique |
| title_sort | ice and abrasive particles an alternative cmp polishing technique |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/9570 |
| work_keys_str_mv | AT bornmelaniepmelanieprovidencia1975 iceandabrasiveparticlesanalternativecmppolishingtechnique |