High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor
We present the design of a concentric tube (CT) reactor for roll-to-roll chemical vapor deposition (CVD) on flexible substrates, and its application to continuous production of graphene on copper foil. In the CTCVD reactor, the thin foil substrate is helically wrapped around the inner tube, and tran...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | en_US |
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Nature Publishing Group
2015
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| Online Access: | http://hdl.handle.net/1721.1/97091 https://orcid.org/0000-0002-7851-7718 https://orcid.org/0000-0002-7372-3512 |
| _version_ | 1811092314655817728 |
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| author | Polsen, Erik S. McNerny, Daniel Q. Viswanath, B. Pattinson, Sebastian W. Hart, Anastasios John |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Polsen, Erik S. McNerny, Daniel Q. Viswanath, B. Pattinson, Sebastian W. Hart, Anastasios John |
| author_sort | Polsen, Erik S. |
| collection | MIT |
| description | We present the design of a concentric tube (CT) reactor for roll-to-roll chemical vapor deposition (CVD) on flexible substrates, and its application to continuous production of graphene on copper foil. In the CTCVD reactor, the thin foil substrate is helically wrapped around the inner tube, and translates through the gap between the concentric tubes. We use a bench-scale prototype machine to synthesize graphene on copper substrates at translation speeds varying from 25 mm/min to 500 mm/min, and investigate the influence of process parameters on the uniformity and coverage of graphene on a continuously moving foil. At lower speeds, high-quality monolayer graphene is formed; at higher speeds, rapid nucleation of small graphene domains is observed, yet coalescence is prevented by the limited residence time in the CTCVD system. We show that a smooth isothermal transition between the reducing and carbon-containing atmospheres, enabled by injection of the carbon feedstock via radial holes in the inner tube, is essential to high-quality roll-to-roll graphene CVD. We discuss how the foil quality and microstructure limit the uniformity of graphene over macroscopic dimensions. We conclude by discussing means of scaling and reconfiguring the CTCVD design based on general requirements for 2-D materials manufacturing. |
| first_indexed | 2024-09-23T15:16:28Z |
| format | Article |
| id | mit-1721.1/97091 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T15:16:28Z |
| publishDate | 2015 |
| publisher | Nature Publishing Group |
| record_format | dspace |
| spelling | mit-1721.1/970912022-10-02T01:48:32Z High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor Polsen, Erik S. McNerny, Daniel Q. Viswanath, B. Pattinson, Sebastian W. Hart, Anastasios John Massachusetts Institute of Technology. Department of Mechanical Engineering Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity Viswanath, B. Pattinson, Sebastian W. Hart, Anastasios John We present the design of a concentric tube (CT) reactor for roll-to-roll chemical vapor deposition (CVD) on flexible substrates, and its application to continuous production of graphene on copper foil. In the CTCVD reactor, the thin foil substrate is helically wrapped around the inner tube, and translates through the gap between the concentric tubes. We use a bench-scale prototype machine to synthesize graphene on copper substrates at translation speeds varying from 25 mm/min to 500 mm/min, and investigate the influence of process parameters on the uniformity and coverage of graphene on a continuously moving foil. At lower speeds, high-quality monolayer graphene is formed; at higher speeds, rapid nucleation of small graphene domains is observed, yet coalescence is prevented by the limited residence time in the CTCVD system. We show that a smooth isothermal transition between the reducing and carbon-containing atmospheres, enabled by injection of the carbon feedstock via radial holes in the inner tube, is essential to high-quality roll-to-roll graphene CVD. We discuss how the foil quality and microstructure limit the uniformity of graphene over macroscopic dimensions. We conclude by discussing means of scaling and reconfiguring the CTCVD design based on general requirements for 2-D materials manufacturing. National Science Foundation (U.S.). Science, Engineering, and Education for Sustainability (Postdoctoral Fellowship Award 1415129) 2015-05-28T17:05:44Z 2015-05-28T17:05:44Z 2015-05 2015-01 Article http://purl.org/eprint/type/JournalArticle 2045-2322 http://hdl.handle.net/1721.1/97091 Polsen, Erik S., Daniel Q. McNerny, B. Viswanath, Sebastian W. Pattinson, and A. John Hart. “High-Speed Roll-to-Roll Manufacturing of Graphene Using a Concentric Tube CVD Reactor.” Sci. Rep. 5 (May 21, 2015): 10257. © 2015 Macmillan Publishers Limited https://orcid.org/0000-0002-7851-7718 https://orcid.org/0000-0002-7372-3512 en_US http://dx.doi.org/10.1038/srep10257 Scientific Reports Creative Commons Attribution http://creativecommons.org/licenses/by/4.0/ application/pdf Nature Publishing Group Nature |
| spellingShingle | Polsen, Erik S. McNerny, Daniel Q. Viswanath, B. Pattinson, Sebastian W. Hart, Anastasios John High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title | High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title_full | High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title_fullStr | High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title_full_unstemmed | High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title_short | High-speed roll-to-roll manufacturing of graphene using a concentric tube CVD reactor |
| title_sort | high speed roll to roll manufacturing of graphene using a concentric tube cvd reactor |
| url | http://hdl.handle.net/1721.1/97091 https://orcid.org/0000-0002-7851-7718 https://orcid.org/0000-0002-7372-3512 |
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