X-ray absorption spectroscopy elucidates the impact of structural disorder on electron mobility in amorphous zinc-tin-oxide thin films

X-ray absorption spectroscopy elucidates the impact of structural disorder on electron mobility in amorphous zinc-tin-oxide thin films

We investigate the correlation between the atomic structures of amorphous zinc-tin-oxide (a-ZTO) thin films grown by atomic layer deposition (ALD) and their electronic transport properties. We perform synchrotron-based X-ray absorption spectroscopy at the K-edges of Zn and Sn with varying [Zn]/[Sn]...

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Bibliographic Details
Main Authors:	Siah, Sin Cheng, Lee, Sang Woon, Lee, Yun Seog, Heo, Jaeyeong, Shibata, Tomohiro, Segre, Carlo U., Gordon, Roy G., Buonassisi, Tonio
Other Authors:	Massachusetts Institute of Technology. Department of Mechanical Engineering
Format:	Article
Language:	en_US
Published:	American Institute of Physics (AIP) 2015
Online Access:	http://hdl.handle.net/1721.1/97238 https://orcid.org/0000-0001-8345-4937

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