Surface kinetic study of ion induced chemical vapor deposition of copper

Surface kinetic study of ion induced chemical vapor deposition of copper

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.

Bibliographic Details
Main Author: Chiang, Tony Ping-chen
Other Authors: Herbert H. Swain and Carl V. Thompson. II.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/9869

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