Development of calibration standards for accurate measurement of geometry in microelectromechanical systems

Development of calibration standards for accurate measurement of geometry in microelectromechanical systems

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author: Deutsch, Erik R. (Erik Robertson), 1974-
Other Authors: Stephen D. Senturia.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/9945

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