Computer aided macromodeling for MEMS
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9955 |
| _version_ | 1826191942724091904 |
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| author | Gabbay, Lynn Daniel |
| author2 | Stephen D. Senturia. |
| author_facet | Stephen D. Senturia. Gabbay, Lynn Daniel |
| author_sort | Gabbay, Lynn Daniel |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. |
| first_indexed | 2024-09-23T09:03:45Z |
| format | Thesis |
| id | mit-1721.1/9955 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:03:45Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/99552019-04-10T10:31:14Z Computer aided macromodeling for MEMS Computer aided macromodeling for microelectromechanical systems Gabbay, Lynn Daniel Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 85-87). by Lynn Daniel Gabbay. Ph.D. 2005-08-19T14:31:02Z 2005-08-19T14:31:02Z 1998 1998 Thesis http://hdl.handle.net/1721.1/9955 40336069 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 87 p. 5357135 bytes 5356889 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Gabbay, Lynn Daniel Computer aided macromodeling for MEMS |
| title | Computer aided macromodeling for MEMS |
| title_full | Computer aided macromodeling for MEMS |
| title_fullStr | Computer aided macromodeling for MEMS |
| title_full_unstemmed | Computer aided macromodeling for MEMS |
| title_short | Computer aided macromodeling for MEMS |
| title_sort | computer aided macromodeling for mems |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/9955 |
| work_keys_str_mv | AT gabbaylynndaniel computeraidedmacromodelingformems AT gabbaylynndaniel computeraidedmacromodelingformicroelectromechanicalsystems |