Active sensing in silicon-based MEMS resonators

Active sensing in silicon-based MEMS resonators

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2015.

Bibliographic Details
Main Author:	Marathe, Radhika (Radhika Atul)
Other Authors:	Dana Weinstein.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2015
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/99778

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