Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy

In this work, we report a mapping of charge transport in silicon nanocrystals (nc-Si) embedded in SiO2 dielectric films with electrostatic force microscopy. The charge diffusion from chargednc-Si to neighboring uncharged nc-Si in the SiO2 matrix is found to be the dominant mechanism for the decay of...

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Main Authors: Lau, Hon Wu, Ng, Chi Yung, Liu, Yang, Tse, Man Siu, Lim, Vanissa Sei Wei, Tan, Ooi Kiang, Chen, Tupei
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/10356/101362
http://hdl.handle.net/10220/6414
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author Lau, Hon Wu
Ng, Chi Yung
Liu, Yang
Tse, Man Siu
Lim, Vanissa Sei Wei
Tan, Ooi Kiang
Chen, Tupei
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Lau, Hon Wu
Ng, Chi Yung
Liu, Yang
Tse, Man Siu
Lim, Vanissa Sei Wei
Tan, Ooi Kiang
Chen, Tupei
author_sort Lau, Hon Wu
collection NTU
description In this work, we report a mapping of charge transport in silicon nanocrystals (nc-Si) embedded in SiO2 dielectric films with electrostatic force microscopy. The charge diffusion from chargednc-Si to neighboring uncharged nc-Si in the SiO2 matrix is found to be the dominant mechanism for the decay of the trapped charge in the nc-Si. The trapped charge and the charge decay have been determined quantitatively from the electrical force measurement. An increase in the area of the charge cloud due to the charge diffusion has been observed clearly. In addition, the blockage and acceleration of charge diffusion by the neighboring charges with the same and opposite charge signs (i.e., positive or negative), respectively, have been observed.
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spelling ntu-10356/1013622020-03-07T14:02:47Z Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy Lau, Hon Wu Ng, Chi Yung Liu, Yang Tse, Man Siu Lim, Vanissa Sei Wei Tan, Ooi Kiang Chen, Tupei School of Electrical and Electronic Engineering A*STAR Institute of Microelectronics DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics In this work, we report a mapping of charge transport in silicon nanocrystals (nc-Si) embedded in SiO2 dielectric films with electrostatic force microscopy. The charge diffusion from chargednc-Si to neighboring uncharged nc-Si in the SiO2 matrix is found to be the dominant mechanism for the decay of the trapped charge in the nc-Si. The trapped charge and the charge decay have been determined quantitatively from the electrical force measurement. An increase in the area of the charge cloud due to the charge diffusion has been observed clearly. In addition, the blockage and acceleration of charge diffusion by the neighboring charges with the same and opposite charge signs (i.e., positive or negative), respectively, have been observed. Published version 2010-09-07T03:01:28Z 2019-12-06T20:37:13Z 2010-09-07T03:01:28Z 2019-12-06T20:37:13Z 2004 2004 Journal Article Lau, H. W., Ng, C. Y., Liu, Y., Tse, M. S., Lim, V. S. W., Tan, O. K., et al. (2004). Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy. Applied physics letters, 85(14), 2941-2943. 0003-6951 https://hdl.handle.net/10356/101362 http://hdl.handle.net/10220/6414 10.1063/1.1801675 en Applied physics letters Applied Physics Letters © copyright 2004 American Institute of Physics. The journal's website is located at http://apl.aip.org/applab/v85/i14/p2941_s1?isAuthorized=no 3 p. application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Lau, Hon Wu
Ng, Chi Yung
Liu, Yang
Tse, Man Siu
Lim, Vanissa Sei Wei
Tan, Ooi Kiang
Chen, Tupei
Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title_full Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title_fullStr Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title_full_unstemmed Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title_short Visualizing charge transport in silicon nanocrystals embedded in SiO2 films with electrostatic force microscopy
title_sort visualizing charge transport in silicon nanocrystals embedded in sio2 films with electrostatic force microscopy
topic DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
url https://hdl.handle.net/10356/101362
http://hdl.handle.net/10220/6414
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