Design and analysis of anchorless shuttle nano-electro-mechanical non-volatile memory for high temperature applications
This paper presents a novel nano-electro-mechanical (NEM) non-volatile memory (NVM) based on an anchorless structure for high operating temperature (>;200°C). The proposed NEM NVM device has two stable mechanical states obtained by adhesion forces, and is actuated by electrostatic forces. This wo...
| Huvudupphovsmän: | , , , |
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| Övriga upphovsmän: | |
| Materialtyp: | Conference Paper |
| Språk: | English |
| Publicerad: |
2013
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| Ämnen: | |
| Länkar: | https://hdl.handle.net/10356/102307 http://hdl.handle.net/10220/16376 |