Optical metrology under extreme conditions

Abstract is not available in fulltext.

Bibliographic Details
Main Authors: Li, Xide, Pedrini, Giancarlo, Fu, Yu
Other Authors: Temasek Laboratories
Format: Journal Article
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/104844
http://hdl.handle.net/10220/20371
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author Li, Xide
Pedrini, Giancarlo
Fu, Yu
author2 Temasek Laboratories
author_facet Temasek Laboratories
Li, Xide
Pedrini, Giancarlo
Fu, Yu
author_sort Li, Xide
collection NTU
description Abstract is not available in fulltext.
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spelling ntu-10356/1048442022-02-16T16:26:09Z Optical metrology under extreme conditions Li, Xide Pedrini, Giancarlo Fu, Yu Temasek Laboratories DRNTU::Science::Physics::Weights and measures Abstract is not available in fulltext. Published version 2014-08-21T06:42:17Z 2019-12-06T21:41:02Z 2014-08-21T06:42:17Z 2019-12-06T21:41:02Z 2014 2014 Journal Article Li, X., Pedrini, G., & Fu, Y. (2014). Optical Metrology under Extreme Conditions. The Scientific World Journal, 2014, 263603-. 1537-744X https://hdl.handle.net/10356/104844 http://hdl.handle.net/10220/20371 10.1155/2014/263603 24982936 en The scientific world journal © 2014 Xide Li et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. application/pdf
spellingShingle DRNTU::Science::Physics::Weights and measures
Li, Xide
Pedrini, Giancarlo
Fu, Yu
Optical metrology under extreme conditions
title Optical metrology under extreme conditions
title_full Optical metrology under extreme conditions
title_fullStr Optical metrology under extreme conditions
title_full_unstemmed Optical metrology under extreme conditions
title_short Optical metrology under extreme conditions
title_sort optical metrology under extreme conditions
topic DRNTU::Science::Physics::Weights and measures
url https://hdl.handle.net/10356/104844
http://hdl.handle.net/10220/20371
work_keys_str_mv AT lixide opticalmetrologyunderextremeconditions
AT pedrinigiancarlo opticalmetrologyunderextremeconditions
AT fuyu opticalmetrologyunderextremeconditions