Applications of higher-order phase shifting algorithms for multiple-wavelength metrology
Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2019
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/104906 http://hdl.handle.net/10220/49473 |
| _version_ | 1826123093619245056 |
|---|---|
| author | Upputuri, Paul Kumar Pramanik, Manojit |
| author2 | School of Chemical and Biomedical Engineering |
| author_facet | School of Chemical and Biomedical Engineering Upputuri, Paul Kumar Pramanik, Manojit |
| author_sort | Upputuri, Paul Kumar |
| collection | NTU |
| description | Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm, which requires a phase shifter such as PZT, has been widely used for accurate phase evolution in interferometry. The phase shifter needs to be calibrated at every wavelength
if multiple wavelengths are used for measurement, it is a time consuming process. If phase shifter is not calibrated accurately, it can introduce phase shift errors. In this work, we will discuss various phase shifting algorithms, and their tolerance for phase shift error. And the applications of higher-order phased shifting algorithms will be presented. The study is useful for multiple-wavelength and white light interferometry where more than one wavelength is used for optical phase measurements. |
| first_indexed | 2024-10-01T05:59:00Z |
| format | Conference Paper |
| id | ntu-10356/104906 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:59:00Z |
| publishDate | 2019 |
| record_format | dspace |
| spelling | ntu-10356/1049062023-12-29T06:44:08Z Applications of higher-order phase shifting algorithms for multiple-wavelength metrology Upputuri, Paul Kumar Pramanik, Manojit School of Chemical and Biomedical Engineering Proceedings of SPIE - Quantitative Phase Imaging Engineering::Chemical engineering Phase Shifting Interferometry Multiple-wavelength Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm, which requires a phase shifter such as PZT, has been widely used for accurate phase evolution in interferometry. The phase shifter needs to be calibrated at every wavelength if multiple wavelengths are used for measurement, it is a time consuming process. If phase shifter is not calibrated accurately, it can introduce phase shift errors. In this work, we will discuss various phase shifting algorithms, and their tolerance for phase shift error. And the applications of higher-order phased shifting algorithms will be presented. The study is useful for multiple-wavelength and white light interferometry where more than one wavelength is used for optical phase measurements. NMRC (Natl Medical Research Council, S’pore) Accepted version 2019-07-26T04:49:28Z 2019-12-06T21:42:23Z 2019-07-26T04:49:28Z 2019-12-06T21:42:23Z 2019-03-01 2019 Conference Paper Upputuri, P. K., & Pramanik, M. (2019). Applications of higher-order phase shifting algorithms for multiple-wavelength metrology. Proceedings of SPIE - Quantitative Phase Imaging. doi:10.1117/12.2511942 https://hdl.handle.net/10356/104906 http://hdl.handle.net/10220/49473 10.1117/12.2511942 209817 en © 2019 Society of Photo-optical Instrumentation Engineers (SPIE). All rights reserved. This paper was published in Proceedings of SPIE - Quantitative Phase Imaging and is made available with permission of Society of Photo-optical Instrumentation Engineers (SPIE). application/pdf |
| spellingShingle | Engineering::Chemical engineering Phase Shifting Interferometry Multiple-wavelength Upputuri, Paul Kumar Pramanik, Manojit Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title | Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title_full | Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title_fullStr | Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title_full_unstemmed | Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title_short | Applications of higher-order phase shifting algorithms for multiple-wavelength metrology |
| title_sort | applications of higher order phase shifting algorithms for multiple wavelength metrology |
| topic | Engineering::Chemical engineering Phase Shifting Interferometry Multiple-wavelength |
| url | https://hdl.handle.net/10356/104906 http://hdl.handle.net/10220/49473 |
| work_keys_str_mv | AT upputuripaulkumar applicationsofhigherorderphaseshiftingalgorithmsformultiplewavelengthmetrology AT pramanikmanojit applicationsofhigherorderphaseshiftingalgorithmsformultiplewavelengthmetrology |