Applications of higher-order phase shifting algorithms for multiple-wavelength metrology
Multiple-wavelength interferometric techniques have been successfully used for large step-height and large deformation measurements. Also it could resolve the step height between smooth and rough surfaces which is not possible with single wavelength interferometry. Temporal phase shifting algorithm,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/104906 http://hdl.handle.net/10220/49473 |