A polymeric microgripper with integrated thermal actuators
This paper describes the design, simulation, fabrication and characterization of a polymeric microgripper with integrated thermal actuators. The microgripper was fabricated by a polymeric surface micromachining process, which utilizes SU-8 as the functional material and silicon as the sacrificial ma...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/106154 http://hdl.handle.net/10220/23918 http://dx.doi.org/10.1088/0960-1317/14/7/018 |