InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators
提出了一种由新型沟槽耦合器和90°弯曲波导构成的InGaAsP/InP基矩形马赫-曾德电光调制器, 对该调制器的L型波导相移臂设计了T型类微带行波电极.首先利用电极的等效电路估算带宽上限, 进而在考虑阻抗匹配、回波损耗以及带宽等性能的基础上, 使用有限元方法对电极的传输、输入/输出以及过渡区的结构参量进行优化.仿真结果表明由于受到电极输入及过渡区的性能限制, 设计的整体行波电极匹配阻抗大于42 Ω, 回波损耗小于－15 dB, 带宽可达65 GHz.测试制备的Ti/Au行波电极, 得到回波损耗为－12 dB和带宽为20 GHz的最优性能. An ultra-compact rectangula...
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| Format: | Journal Article |
| Language: | English |
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2019
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| Online Access: | https://hdl.handle.net/10356/106943 http://hdl.handle.net/10220/50249 http://dx.doi.org/10.3788/gzxb20174605.0523002 |
| _version_ | 1811690953167077376 |
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| author | 赵丽亚 Zhao Li-Ya 王乐 Wang Le 杨妍 Yang Yan 刘克 Liu Ke |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering 赵丽亚 Zhao Li-Ya 王乐 Wang Le 杨妍 Yang Yan 刘克 Liu Ke |
| author_sort | 赵丽亚 Zhao Li-Ya |
| collection | NTU |
| description | 提出了一种由新型沟槽耦合器和90°弯曲波导构成的InGaAsP/InP基矩形马赫-曾德电光调制器, 对该调制器的L型波导相移臂设计了T型类微带行波电极.首先利用电极的等效电路估算带宽上限, 进而在考虑阻抗匹配、回波损耗以及带宽等性能的基础上, 使用有限元方法对电极的传输、输入/输出以及过渡区的结构参量进行优化.仿真结果表明由于受到电极输入及过渡区的性能限制, 设计的整体行波电极匹配阻抗大于42 Ω, 回波损耗小于－15 dB, 带宽可达65 GHz.测试制备的Ti/Au行波电极, 得到回波损耗为－12 dB和带宽为20 GHz的最优性能. An ultra-compact rectangular Mach-Zehnder (MZ) interference Electro-Optic (EO) modulator on InGaAsP/InP platform was proposed. This modulator consists of novel trench couplers and 90° waveguide bends. T type microstrip Travelling-Wave (TW) electrodes were designed for the L-shape waveguide phase shift arm of the MZ modulator. First of all, an upper bandwidth limit of this modulator was evaluated by using an equivalent circuit model of the TW electrodes. According to microwave characteristics such as impedance match, return loss and bandwidth, the transmission and input/output of electrodes and structure parameters of transition regions were optimized through a finite element analysis method. The simulation results show that being limited by the input of electrodes and transition regions, the overall TW electrodes exhibit an impedance match of >42Ω, return loss of <－15 dB and bandwidth of 65 GHz. Experimentally the return loss of －12 dB and the bandwidth of >20 GHz are obtained in terms of the fabricated Ti/Au electrodes on an InP substrate. |
| first_indexed | 2024-10-01T06:12:11Z |
| format | Journal Article |
| id | ntu-10356/106943 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:12:11Z |
| publishDate | 2019 |
| record_format | dspace |
| spelling | ntu-10356/1069432019-12-06T22:21:36Z InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators 赵丽亚 Zhao Li-Ya 王乐 Wang Le 杨妍 Yang Yan 刘克 Liu Ke School of Electrical and Electronic Engineering 电光调制 集成光学 Engineering::Electrical and electronic engineering 提出了一种由新型沟槽耦合器和90°弯曲波导构成的InGaAsP/InP基矩形马赫-曾德电光调制器, 对该调制器的L型波导相移臂设计了T型类微带行波电极.首先利用电极的等效电路估算带宽上限, 进而在考虑阻抗匹配、回波损耗以及带宽等性能的基础上, 使用有限元方法对电极的传输、输入/输出以及过渡区的结构参量进行优化.仿真结果表明由于受到电极输入及过渡区的性能限制, 设计的整体行波电极匹配阻抗大于42 Ω, 回波损耗小于－15 dB, 带宽可达65 GHz.测试制备的Ti/Au行波电极, 得到回波损耗为－12 dB和带宽为20 GHz的最优性能. An ultra-compact rectangular Mach-Zehnder (MZ) interference Electro-Optic (EO) modulator on InGaAsP/InP platform was proposed. This modulator consists of novel trench couplers and 90° waveguide bends. T type microstrip Travelling-Wave (TW) electrodes were designed for the L-shape waveguide phase shift arm of the MZ modulator. First of all, an upper bandwidth limit of this modulator was evaluated by using an equivalent circuit model of the TW electrodes. According to microwave characteristics such as impedance match, return loss and bandwidth, the transmission and input/output of electrodes and structure parameters of transition regions were optimized through a finite element analysis method. The simulation results show that being limited by the input of electrodes and transition regions, the overall TW electrodes exhibit an impedance match of >42Ω, return loss of <－15 dB and bandwidth of 65 GHz. Experimentally the return loss of －12 dB and the bandwidth of >20 GHz are obtained in terms of the fabricated Ti/Au electrodes on an InP substrate. MOE (Min. of Education, S’pore) Published version 2019-10-23T07:51:39Z 2019-12-06T22:21:36Z 2019-10-23T07:51:39Z 2019-12-06T22:21:36Z 2017 Journal Article Zhao, L-Y., Wang, L., Yang, Y., & Liu, K. (2017). InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators. 光子学报 Acta Photonica Sinica, 46(5), 0523002-. doi:10.3788/gzxb20174605.0523002 https://hdl.handle.net/10356/106943 http://hdl.handle.net/10220/50249 http://dx.doi.org/10.3788/gzxb20174605.0523002 en 光子学报 Acta Photonica Sinica © 2017 Editorial Office of Acta Photonica Sinica. All rights reserved. This paper was published in 光子学报 Acta Photonica Sinica and is made available with permission of Editorial Office of Acta Photonica Sinica. 10 p. application/pdf |
| spellingShingle | 电光调制 集成光学 Engineering::Electrical and electronic engineering 赵丽亚 Zhao Li-Ya 王乐 Wang Le 杨妍 Yang Yan 刘克 Liu Ke InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title | InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title_full | InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title_fullStr | InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title_full_unstemmed | InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title_short | InP基矩形马赫-曾德高速电光调制器行波电极设计与测试 = Design and characterization of traveling-wave electrodes for InP-based rectangular Mach-Zehnder high speed Electro-Optic modulators |
| title_sort | inp基矩形马赫 曾德高速电光调制器行波电极设计与测试 design and characterization of traveling wave electrodes for inp based rectangular mach zehnder high speed electro optic modulators |
| topic | 电光调制 集成光学 Engineering::Electrical and electronic engineering |
| url | https://hdl.handle.net/10356/106943 http://hdl.handle.net/10220/50249 http://dx.doi.org/10.3788/gzxb20174605.0523002 |
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