Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas

The growth kinetics of single-walled carbon nanotubes (SWCNTs) in a low-temperature, low-pressure reactive plasma is investigated using a multiscale numerical simulation, including the plasma sheath and surface diffusion modules. The plasma-related effects on the characteristics of SWCNT growth are...

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Main Authors: Marvi, Z., Xu, S., Foroutan, G., Ostrikov, K.
Other Authors: Institute of Advanced Studies
Format: Journal Article
Language:English
Published: 2015
Subjects:
Online Access:https://hdl.handle.net/10356/106984
http://hdl.handle.net/10220/25273
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author Marvi, Z.
Xu, S.
Foroutan, G.
Ostrikov, K.
author2 Institute of Advanced Studies
author_facet Institute of Advanced Studies
Marvi, Z.
Xu, S.
Foroutan, G.
Ostrikov, K.
author_sort Marvi, Z.
collection NTU
description The growth kinetics of single-walled carbon nanotubes (SWCNTs) in a low-temperature, low-pressure reactive plasma is investigated using a multiscale numerical simulation, including the plasma sheath and surface diffusion modules. The plasma-related effects on the characteristics of SWCNT growth are studied. It is found that in the presence of reactive radicals in addition to energetic ions inside the plasma sheath area, the effective carbon flux, and the growth rate of SWCNT increase. It is shown that the concentration of atomic hydrogen and hydrocarbon radicals in the plasma plays an important role in the SWCNT growth. The effect of the effective carbon flux on the SWCNT growth rate is quantified. The dependence of the growth parameters on the substrate temperature is also investigated. The effects of the plasma sheath parameters on the growth parameters are different in low- and high-substrate temperature regimes. The optimum substrate temperature and applied DC bias are estimated to maximize the growth rate of the single-walled carbon nanotubes.
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spelling ntu-10356/1069842020-09-26T21:55:34Z Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas Marvi, Z. Xu, S. Foroutan, G. Ostrikov, K. Institute of Advanced Studies DRNTU::Engineering::Nanotechnology The growth kinetics of single-walled carbon nanotubes (SWCNTs) in a low-temperature, low-pressure reactive plasma is investigated using a multiscale numerical simulation, including the plasma sheath and surface diffusion modules. The plasma-related effects on the characteristics of SWCNT growth are studied. It is found that in the presence of reactive radicals in addition to energetic ions inside the plasma sheath area, the effective carbon flux, and the growth rate of SWCNT increase. It is shown that the concentration of atomic hydrogen and hydrocarbon radicals in the plasma plays an important role in the SWCNT growth. The effect of the effective carbon flux on the SWCNT growth rate is quantified. The dependence of the growth parameters on the substrate temperature is also investigated. The effects of the plasma sheath parameters on the growth parameters are different in low- and high-substrate temperature regimes. The optimum substrate temperature and applied DC bias are estimated to maximize the growth rate of the single-walled carbon nanotubes. Published version 2015-03-24T09:05:33Z 2019-12-06T22:22:26Z 2015-03-24T09:05:33Z 2019-12-06T22:22:26Z 2015 2015 Journal Article Marvi, Z., Xu, S., Foroutan, G., & Ostrikov, K. (2015). Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas. Physics of plasmas, 22(1), 013504-. 1070-664X https://hdl.handle.net/10356/106984 http://hdl.handle.net/10220/25273 10.1063/1.4905522 en Physics of plasmas © 2015 AIP Publishing LLC. This paper was published in Physics of Plasmas and is made available as an electronic reprint (preprint) with permission of AIP Publishing LLC. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.4905522].  One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 11 p. application/pdf
spellingShingle DRNTU::Engineering::Nanotechnology
Marvi, Z.
Xu, S.
Foroutan, G.
Ostrikov, K.
Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title_full Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title_fullStr Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title_full_unstemmed Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title_short Contribution of radicals and ions in catalyzed growth of single-walled carbon nanotubes from low-temperature plasmas
title_sort contribution of radicals and ions in catalyzed growth of single walled carbon nanotubes from low temperature plasmas
topic DRNTU::Engineering::Nanotechnology
url https://hdl.handle.net/10356/106984
http://hdl.handle.net/10220/25273
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