Micromachined high-g accelerometers : a review
This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in r...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2015
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338 |
| _version_ | 1824455009935294464 |
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| author | Narasimhan, Vinayak Li, Holden Miao, Jianmin |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Narasimhan, Vinayak Li, Holden Miao, Jianmin |
| author_sort | Narasimhan, Vinayak |
| collection | NTU |
| description | This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed. |
| first_indexed | 2025-02-19T03:31:24Z |
| format | Journal Article |
| id | ntu-10356/107207 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2025-02-19T03:31:24Z |
| publishDate | 2015 |
| record_format | dspace |
| spelling | ntu-10356/1072072023-03-04T17:17:42Z Micromachined high-g accelerometers : a review Narasimhan, Vinayak Li, Holden Miao, Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed. Accepted version 2015-04-08T08:42:14Z 2019-12-06T22:26:43Z 2015-04-08T08:42:14Z 2019-12-06T22:26:43Z 2015 2015 Journal Article Narasimhan, V., Li, H., Miao, J. (2015). Micromachined high-g accelerometers : a review. Journal of micromechanics and microengineering, 25. https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338 10.1088/0960-1317/25/3/033001 184256 en Journal of micromechanics and microengineering © 2015 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Journal of Micromechanics and Microengineering, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1088/0960-1317/25/3/033001]. 31 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering::Mechatronics Narasimhan, Vinayak Li, Holden Miao, Jianmin Micromachined high-g accelerometers : a review |
| title | Micromachined high-g accelerometers : a review |
| title_full | Micromachined high-g accelerometers : a review |
| title_fullStr | Micromachined high-g accelerometers : a review |
| title_full_unstemmed | Micromachined high-g accelerometers : a review |
| title_short | Micromachined high-g accelerometers : a review |
| title_sort | micromachined high g accelerometers a review |
| topic | DRNTU::Engineering::Mechanical engineering::Mechatronics |
| url | https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338 |
| work_keys_str_mv | AT narasimhanvinayak micromachinedhighgaccelerometersareview AT liholden micromachinedhighgaccelerometersareview AT miaojianmin micromachinedhighgaccelerometersareview |