Band alignment of HfAlO/GaN (0001) determined by X-ray photoelectron spectroscopy : effect of in situ SiH4 passivation
The energy band alignment between HfAlO and GaN (0001) was characterized using high-resolution x-ray photoelectron spectroscopy (XPS). The HfAlO was deposited using a metal-organic chemical vapor deposition (MOCVD) gate cluster. A valence band offset of 0.38 eV and a conduction band offset of 2.2...
Main Authors: | Liu, Xinke, Liu, Zhihong, Pannirselvam, Somasuntharam, Pan, Jishen, Liu, Wei, Jia, Fang, Lu, Youming, Liu, Chang, Yu, Wenjie, He, Jin, Tan, Leng Seow |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Journal Article |
Language: | English |
Published: |
2015
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/107402 http://hdl.handle.net/10220/25476 http://dx.doi.org/10.1016/j.jallcom.2015.02.139 |
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