Development of a phase-shifting interferometer for surface inspection
This project aims at making full use of present day technology to implement a Digital Phase-Shifting Interferometer that can be used to determine the form errors of any reflective precision flat or curved surfaces. The computerised system takes over the laborious job of analysing the interferogram a...
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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2008
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| Online Access: | http://hdl.handle.net/10356/13359 |
| _version_ | 1811691960605343744 |
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| author | Low, Beng Yew. |
| author2 | Tam, Siu Chung |
| author_facet | Tam, Siu Chung Low, Beng Yew. |
| author_sort | Low, Beng Yew. |
| collection | NTU |
| description | This project aims at making full use of present day technology to implement a Digital Phase-Shifting Interferometer that can be used to determine the form errors of any reflective precision flat or curved surfaces. The computerised system takes over the laborious job of analysing the interferogram and provides a faster and more accurate acquisition of the interference images. The measurement accuracy and consistency are determined for various fringe processing technique. Uniform averaging, Gaussian weighted averaging, spin filtering and repetitive spin filtering are attempted. Finally, the flatness of three different surfaces - a cosmetic mirror, a test flat and silicon wafer were examined. |
| first_indexed | 2024-10-01T06:28:12Z |
| format | Thesis |
| id | ntu-10356/13359 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:28:12Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/133592020-10-01T08:32:53Z Development of a phase-shifting interferometer for surface inspection Low, Beng Yew. Tam, Siu Chung School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging This project aims at making full use of present day technology to implement a Digital Phase-Shifting Interferometer that can be used to determine the form errors of any reflective precision flat or curved surfaces. The computerised system takes over the laborious job of analysing the interferogram and provides a faster and more accurate acquisition of the interference images. The measurement accuracy and consistency are determined for various fringe processing technique. Uniform averaging, Gaussian weighted averaging, spin filtering and repetitive spin filtering are attempted. Finally, the flatness of three different surfaces - a cosmetic mirror, a test flat and silicon wafer were examined. Master of Science (Consumer Electronics) 2008-08-27T06:26:29Z 2008-10-20T07:26:26Z 2008-08-27T06:26:29Z 2008-10-20T07:26:26Z 1998 1998 Thesis http://hdl.handle.net/10356/13359 en 230 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Low, Beng Yew. Development of a phase-shifting interferometer for surface inspection |
| title | Development of a phase-shifting interferometer for surface inspection |
| title_full | Development of a phase-shifting interferometer for surface inspection |
| title_fullStr | Development of a phase-shifting interferometer for surface inspection |
| title_full_unstemmed | Development of a phase-shifting interferometer for surface inspection |
| title_short | Development of a phase-shifting interferometer for surface inspection |
| title_sort | development of a phase shifting interferometer for surface inspection |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging |
| url | http://hdl.handle.net/10356/13359 |
| work_keys_str_mv | AT lowbengyew developmentofaphaseshiftinginterferometerforsurfaceinspection |