High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications
Vanadium dioxide (VO2) is one of the most promising thermochromic materials for smart windows application because of its ability to modulate infrared radiation (IR) by reversibly transform from semiconductor-like monoclinic VO2 (M) to metallic rutile VO2 (R) above its transition temperature (τc). De...
| Main Authors: | , , , , |
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| Format: | Journal Article |
| Language: | English |
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2020
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| Online Access: | https://hdl.handle.net/10356/138811 |
| _version_ | 1811679435956420608 |
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| author | Vu, Tuan Duc Liu, Shiyu Zeng, Xianting Li, Chuanchang Long, Yi |
| author2 | School of Materials Science & Engineering |
| author_facet | School of Materials Science & Engineering Vu, Tuan Duc Liu, Shiyu Zeng, Xianting Li, Chuanchang Long, Yi |
| author_sort | Vu, Tuan Duc |
| collection | NTU |
| description | Vanadium dioxide (VO2) is one of the most promising thermochromic materials for smart windows application because of its ability to modulate infrared radiation (IR) by reversibly transform from semiconductor-like monoclinic VO2 (M) to metallic rutile VO2 (R) above its transition temperature (τc). Despite the promising potential, VO2 has not been commercialized due to various technical difficulties which hinder its feasibilities outside of laboratories environment. One of those is the efficiency of high quality VO2 thin-film fabrication process. In this paper, we presented a method utilizing high-power impulse magnetron sputtering (HiPIMS) to deposit VO2 thin-film on a commercial material such as soda-lime glass substrate with a respectable deposition rate of 5.7 nm/min. The VO2 deposited on soda-lime glass exhibits excellent crystallinity and thermochromic properties (highest luminous transmission Tlum ≈ 30.4%, and solar modulation ΔTsol ≈ 12%) in comparison with similarly prepared VO2 on high temperature glass and quartz substrates. The high crystallinity rendered by short deposition duration and high ionization in HiPIMS process opens opportunities to apply high quality VO2 thin-film onto a variety of substrate more efficiently. |
| first_indexed | 2024-10-01T03:09:07Z |
| format | Journal Article |
| id | ntu-10356/138811 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:09:07Z |
| publishDate | 2020 |
| record_format | dspace |
| spelling | ntu-10356/1388112021-05-01T20:12:39Z High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications Vu, Tuan Duc Liu, Shiyu Zeng, Xianting Li, Chuanchang Long, Yi School of Materials Science & Engineering Singapore-HUJ Alliance for Research and Enterprise Nanomaterials for Energy and Energy-Water Nexus Campus for Research Excellence and Technological Enterprise Singapore Institute of Manufacturing Technology Engineering::Materials Vanadium Dioxide Magnetron Sputtering Vanadium dioxide (VO2) is one of the most promising thermochromic materials for smart windows application because of its ability to modulate infrared radiation (IR) by reversibly transform from semiconductor-like monoclinic VO2 (M) to metallic rutile VO2 (R) above its transition temperature (τc). Despite the promising potential, VO2 has not been commercialized due to various technical difficulties which hinder its feasibilities outside of laboratories environment. One of those is the efficiency of high quality VO2 thin-film fabrication process. In this paper, we presented a method utilizing high-power impulse magnetron sputtering (HiPIMS) to deposit VO2 thin-film on a commercial material such as soda-lime glass substrate with a respectable deposition rate of 5.7 nm/min. The VO2 deposited on soda-lime glass exhibits excellent crystallinity and thermochromic properties (highest luminous transmission Tlum ≈ 30.4%, and solar modulation ΔTsol ≈ 12%) in comparison with similarly prepared VO2 on high temperature glass and quartz substrates. The high crystallinity rendered by short deposition duration and high ionization in HiPIMS process opens opportunities to apply high quality VO2 thin-film onto a variety of substrate more efficiently. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) Accepted version 2020-05-13T02:26:43Z 2020-05-13T02:26:43Z 2019 Journal Article Vu, T. D., Liu, S., Zeng, X., Li, C., & Long, Y. (2020). High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications. Ceramics International, 46(6), 8145-8153. doi:10.1016/j.ceramint.2019.12.042 0272-8842 https://hdl.handle.net/10356/138811 10.1016/j.ceramint.2019.12.042 2-s2.0-85076245175 6 46 8145 8153 en Ceramics International https://doi.org/10.21979/N9/VFQG8Q © 2019 Elsevier Ltd and Techna Group S.r.l. All rights reserved. This paper was published in Ceramics International and is made available with permission of Elsevier Ltd and Techna Group S.r.l. application/pdf |
| spellingShingle | Engineering::Materials Vanadium Dioxide Magnetron Sputtering Vu, Tuan Duc Liu, Shiyu Zeng, Xianting Li, Chuanchang Long, Yi High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title | High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title_full | High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title_fullStr | High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title_full_unstemmed | High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title_short | High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| title_sort | high power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications |
| topic | Engineering::Materials Vanadium Dioxide Magnetron Sputtering |
| url | https://hdl.handle.net/10356/138811 |
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