The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/140386 |
| _version_ | 1811691860654030848 |
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| author | Liu, Binghai Hua, Younan Dong, Zhili Tan, Pik Kee Zhao, Yuzhe Mo, Zhiqiang Lam, Jeffrey Mai, Zhihong |
| author2 | School of Materials Science & Engineering |
| author_facet | School of Materials Science & Engineering Liu, Binghai Hua, Younan Dong, Zhili Tan, Pik Kee Zhao, Yuzhe Mo, Zhiqiang Lam, Jeffrey Mai, Zhihong |
| author_sort | Liu, Binghai |
| collection | NTU |
| description | The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials. |
| first_indexed | 2024-10-01T06:26:36Z |
| format | Conference Paper |
| id | ntu-10356/140386 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:26:36Z |
| publishDate | 2020 |
| record_format | dspace |
| spelling | ntu-10356/1403862020-06-01T10:21:14Z The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM Liu, Binghai Hua, Younan Dong, Zhili Tan, Pik Kee Zhao, Yuzhe Mo, Zhiqiang Lam, Jeffrey Mai, Zhihong School of Materials Science & Engineering 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Engineering::Materials Electron Beam Sensitive Electron Beam Radiation The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials. 2020-05-28T08:37:53Z 2020-05-28T08:37:53Z 2018 Conference Paper Liu, B., Hua, Y., Dong, Z., Tan, P. K., Zhao, Y., Mo, Z., . . . Mai, Z. (2018). The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM. Proceedings of the 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). doi:10.1109/IPFA.2018.8452485 978-1-5386-4930-5 1946-1550 https://hdl.handle.net/10356/140386 10.1109/IPFA.2018.8452485 en © 2018 IEEE. All rights reserved. |
| spellingShingle | Engineering::Materials Electron Beam Sensitive Electron Beam Radiation Liu, Binghai Hua, Younan Dong, Zhili Tan, Pik Kee Zhao, Yuzhe Mo, Zhiqiang Lam, Jeffrey Mai, Zhihong The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title | The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title_full | The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title_fullStr | The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title_full_unstemmed | The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title_short | The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM |
| title_sort | overview of the impacts of electron radiation on semiconductor failure analysis by sem fib and tem |
| topic | Engineering::Materials Electron Beam Sensitive Electron Beam Radiation |
| url | https://hdl.handle.net/10356/140386 |
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