Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system

A grating-coupled plasmonic sensor for sucrose sensing was fabricated and experimentally validated in the spectral interrogation mode. The grating structures were fabricated on a silicon wafer using an optical fiber-based interference lithography (OFIL) system. The system can be easily reconfigured...

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Main Authors: Pae, Jian Yi, Sahoo, Pankaj Kumar, Murukeshan, Vadakke Matham
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/141000
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author Pae, Jian Yi
Sahoo, Pankaj Kumar
Murukeshan, Vadakke Matham
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Pae, Jian Yi
Sahoo, Pankaj Kumar
Murukeshan, Vadakke Matham
author_sort Pae, Jian Yi
collection NTU
description A grating-coupled plasmonic sensor for sucrose sensing was fabricated and experimentally validated in the spectral interrogation mode. The grating structures were fabricated on a silicon wafer using an optical fiber-based interference lithography (OFIL) system. The system can be easily reconfigured to write 1D grating features with a periodicity ranging from 514 nm to 1,646 nm. The patterned area can also be controlled from 5 mm down to 0.6 mm for energy efficient, device scale fabrication. The results demonstrated the potential of using the OFIL system as a highly versatile and low-cost method to fabricate grating-coupled plasmonic sensors for healthcare applications.
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spelling ntu-10356/1410002020-09-26T22:07:41Z Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system Pae, Jian Yi Sahoo, Pankaj Kumar Murukeshan, Vadakke Matham School of Mechanical and Aerospace Engineering Centre for Optical and Laser Engineering Singapore Centre for 3D Printing Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Gratings Interference Lithography A grating-coupled plasmonic sensor for sucrose sensing was fabricated and experimentally validated in the spectral interrogation mode. The grating structures were fabricated on a silicon wafer using an optical fiber-based interference lithography (OFIL) system. The system can be easily reconfigured to write 1D grating features with a periodicity ranging from 514 nm to 1,646 nm. The patterned area can also be controlled from 5 mm down to 0.6 mm for energy efficient, device scale fabrication. The results demonstrated the potential of using the OFIL system as a highly versatile and low-cost method to fabricate grating-coupled plasmonic sensors for healthcare applications. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) EDB (Economic Devt. Board, S’pore) Accepted version 2020-06-03T06:24:53Z 2020-06-03T06:24:53Z 2019 Journal Article Pae, J. Y., Sahoo, P. K., & Murukeshan, V. M. (2019). Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system. IEEE Sensors Journal, 19(22), 10477-10481. doi:10.1109/JSEN.2019.2933668 1530-437X https://hdl.handle.net/10356/141000 10.1109/JSEN.2019.2933668 22 19 10477 10481 en RG192/17 IEEE Sensors Journal © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: https://doi.org/10.1109/JSEN.2019.2933668. application/pdf
spellingShingle Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Gratings
Interference Lithography
Pae, Jian Yi
Sahoo, Pankaj Kumar
Murukeshan, Vadakke Matham
Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title_full Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title_fullStr Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title_full_unstemmed Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title_short Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system
title_sort grating coupled plasmonic sensor for sucrose sensing fabricated using optical fiber based interference lithography ofil system
topic Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Gratings
Interference Lithography
url https://hdl.handle.net/10356/141000
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