High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm

We introduced photon-trapping microstructures into GeSn-based photodetectors for the first time, and achieved high-efficiency photo detection at 2 µm with a responsivity of 0.11 A/W. The demonstration was realized by a GeSn/Ge multiple-quantum-well (MQW) p-i-n photodiode on a GeOI architecture. Comp...

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Main Authors: Zhou, Hao, Xu, Shengqiang, Lin, Yiding, Huang, Yi-Chiau, Son, Bongkwon, Chen, Qimiao, Guo, Xin, Lee, Kwang Hong, Goh, Simon Chun-Kiat, Gong, Xiao, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/141368
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author Zhou, Hao
Xu, Shengqiang
Lin, Yiding
Huang, Yi-Chiau
Son, Bongkwon
Chen, Qimiao
Guo, Xin
Lee, Kwang Hong
Goh, Simon Chun-Kiat
Gong, Xiao
Tan, Chuan Seng
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Zhou, Hao
Xu, Shengqiang
Lin, Yiding
Huang, Yi-Chiau
Son, Bongkwon
Chen, Qimiao
Guo, Xin
Lee, Kwang Hong
Goh, Simon Chun-Kiat
Gong, Xiao
Tan, Chuan Seng
author_sort Zhou, Hao
collection NTU
description We introduced photon-trapping microstructures into GeSn-based photodetectors for the first time, and achieved high-efficiency photo detection at 2 µm with a responsivity of 0.11 A/W. The demonstration was realized by a GeSn/Ge multiple-quantum-well (MQW) p-i-n photodiode on a GeOI architecture. Compared with the non-photon-trapping counterparts, the patterning and etching of photon-trapping microstructure can be processed in the same step with mesa structure at no additional cost. A four-fold enhancement of photo response was achieved at 2 µm. Although the incorporation of photo-trapping microstructure degrades the dark current density which increases from 31.5 to 45.2 mA/cm2 at −1 V, it benefits an improved 3-dB bandwidth of 2.7 GHz at bias voltage at −5 V. The optical performance of GeSn/Ge MQW photon-trapping photodetector manifests its great potential as a candidate for efficient 2 µm communication. Additionally, the underlying GeOI platform enables its feasibility of monolithic integration with other photonic components such as waveguide, modulator and (de)multiplexer for optoelectronic integrated circuits (OEICs) operating at 2 µm.
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spelling ntu-10356/1413682020-07-07T01:03:59Z High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm Zhou, Hao Xu, Shengqiang Lin, Yiding Huang, Yi-Chiau Son, Bongkwon Chen, Qimiao Guo, Xin Lee, Kwang Hong Goh, Simon Chun-Kiat Gong, Xiao Tan, Chuan Seng School of Electrical and Electronic Engineering Low Energy Electronic Systems Singapore-MIT Alliance Programme Engineering::Electrical and electronic engineering::Semiconductors Germanium Photodetector We introduced photon-trapping microstructures into GeSn-based photodetectors for the first time, and achieved high-efficiency photo detection at 2 µm with a responsivity of 0.11 A/W. The demonstration was realized by a GeSn/Ge multiple-quantum-well (MQW) p-i-n photodiode on a GeOI architecture. Compared with the non-photon-trapping counterparts, the patterning and etching of photon-trapping microstructure can be processed in the same step with mesa structure at no additional cost. A four-fold enhancement of photo response was achieved at 2 µm. Although the incorporation of photo-trapping microstructure degrades the dark current density which increases from 31.5 to 45.2 mA/cm2 at −1 V, it benefits an improved 3-dB bandwidth of 2.7 GHz at bias voltage at −5 V. The optical performance of GeSn/Ge MQW photon-trapping photodetector manifests its great potential as a candidate for efficient 2 µm communication. Additionally, the underlying GeOI platform enables its feasibility of monolithic integration with other photonic components such as waveguide, modulator and (de)multiplexer for optoelectronic integrated circuits (OEICs) operating at 2 µm. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) Published version 2020-06-08T03:07:16Z 2020-06-08T03:07:16Z 2020 Journal Article Zhou, H., Xu, S., Lin, Y., Huang, Y.-C., Son, B., Chen, Q., . . . Tan, C. S. (2020). High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm. Optics Express, 28(7), 10280-10293. doi:10.1364/OE.389378 1094-4087 https://hdl.handle.net/10356/141368 10.1364/OE.389378 7 28 10280 10293 en Optics Express © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved. application/pdf
spellingShingle Engineering::Electrical and electronic engineering::Semiconductors
Germanium
Photodetector
Zhou, Hao
Xu, Shengqiang
Lin, Yiding
Huang, Yi-Chiau
Son, Bongkwon
Chen, Qimiao
Guo, Xin
Lee, Kwang Hong
Goh, Simon Chun-Kiat
Gong, Xiao
Tan, Chuan Seng
High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title_full High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title_fullStr High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title_full_unstemmed High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title_short High-efficiency GeSn/Ge multiple-quantum-well photodetectors with photon-trapping microstructures operating at 2 µm
title_sort high efficiency gesn ge multiple quantum well photodetectors with photon trapping microstructures operating at 2 µm
topic Engineering::Electrical and electronic engineering::Semiconductors
Germanium
Photodetector
url https://hdl.handle.net/10356/141368
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