Effects of diamond-like carbon and other dielectric layers on EPCOS SAW devices and structured wafers
Diamond-like carbon (DLC) films were deposited on Y-X quartz, Y-Z LiNbO3 and 42orot.Y-X LiTaO3 substrates through incorporation of a few nanometers’ thick SiC interlayer using plasma enhanced CVD (PECVD) technique. The “D” and “G” peaks of Raman scattering spectra were located at 1360-1376 and 15...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Research Report |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/14165 |