Automatic localization of signal sources in photon emission images for integrated circuit analysis

Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern...

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Principais autores: Boscaro, Anthony, Jacquir, Sabir, Chef, Samuel, Sanchez, Kevin, Perdu, Philippe, Binczak, Stéphane
Outros Autores: Temasek Laboratories
Formato: Journal Article
Idioma:English
Publicado em: 2020
Assuntos:
Acesso em linha:https://hdl.handle.net/10356/141803
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author Boscaro, Anthony
Jacquir, Sabir
Chef, Samuel
Sanchez, Kevin
Perdu, Philippe
Binczak, Stéphane
author2 Temasek Laboratories
author_facet Temasek Laboratories
Boscaro, Anthony
Jacquir, Sabir
Chef, Samuel
Sanchez, Kevin
Perdu, Philippe
Binczak, Stéphane
author_sort Boscaro, Anthony
collection NTU
description Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern ICs. The identification of the emission spots is an essential step of the process because it shows where is located the electrical activity in the chip. Due to scaling, more and more emission nodes are located within the acquisition area so that large variations of emission intensity can exist. Thresholding techniques have been implemented, but they fail to provide an exhaustive localization. To overcome this problem, we introduce in this paper an automatic unsupervised process. It is based on a combination of median filtering, mathematical morphology and local maxima research. This new approach is evaluated and tested on 20 photon emission images (real and simulated). The final result is compared to an expert evaluation, and the detection quality is quantified.
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spelling ntu-10356/1418032020-06-11T00:55:41Z Automatic localization of signal sources in photon emission images for integrated circuit analysis Boscaro, Anthony Jacquir, Sabir Chef, Samuel Sanchez, Kevin Perdu, Philippe Binczak, Stéphane Temasek Laboratories Science::Physics Photon Emission Microelectronics Reliability Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern ICs. The identification of the emission spots is an essential step of the process because it shows where is located the electrical activity in the chip. Due to scaling, more and more emission nodes are located within the acquisition area so that large variations of emission intensity can exist. Thresholding techniques have been implemented, but they fail to provide an exhaustive localization. To overcome this problem, we introduce in this paper an automatic unsupervised process. It is based on a combination of median filtering, mathematical morphology and local maxima research. This new approach is evaluated and tested on 20 photon emission images (real and simulated). The final result is compared to an expert evaluation, and the detection quality is quantified. 2020-06-11T00:55:40Z 2020-06-11T00:55:40Z 2017 Journal Article Boscaro, A., Jacquir, S., Chef, S., Sanchez, K., Perdu, P., & Binczak, S. (2018). Automatic localization of signal sources in photon emission images for integrated circuit analysis. Signal, Image and Video Processing, 12(4), 775-782. doi:10.1007/s11760-017-1219-z 1863-1703 https://hdl.handle.net/10356/141803 10.1007/s11760-017-1219-z 2-s2.0-85038397621 4 12 775 782 en Signal, Image and Video Processing © 2017 Springer-Verlag London Ltd., part of Springer Nature. All rights reserved.
spellingShingle Science::Physics
Photon Emission
Microelectronics Reliability
Boscaro, Anthony
Jacquir, Sabir
Chef, Samuel
Sanchez, Kevin
Perdu, Philippe
Binczak, Stéphane
Automatic localization of signal sources in photon emission images for integrated circuit analysis
title Automatic localization of signal sources in photon emission images for integrated circuit analysis
title_full Automatic localization of signal sources in photon emission images for integrated circuit analysis
title_fullStr Automatic localization of signal sources in photon emission images for integrated circuit analysis
title_full_unstemmed Automatic localization of signal sources in photon emission images for integrated circuit analysis
title_short Automatic localization of signal sources in photon emission images for integrated circuit analysis
title_sort automatic localization of signal sources in photon emission images for integrated circuit analysis
topic Science::Physics
Photon Emission
Microelectronics Reliability
url https://hdl.handle.net/10356/141803
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