3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI
This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched...
| Main Authors: | , , , , , , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/142156 |
| _version_ | 1826110522526793728 |
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| author | Liu, Wenjuan He, Leming Wang, Xubo Zhou, Jia Xu, Weijiang Smagin, Nikolay Toubal, Malika Yu, Hao Gu, Yuandong Xu, Jinghui Remiens, Denis Ren, Junyan |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Liu, Wenjuan He, Leming Wang, Xubo Zhou, Jia Xu, Weijiang Smagin, Nikolay Toubal, Malika Yu, Hao Gu, Yuandong Xu, Jinghui Remiens, Denis Ren, Junyan |
| author_sort | Liu, Wenjuan |
| collection | NTU |
| description | This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems. |
| first_indexed | 2024-10-01T02:35:48Z |
| format | Journal Article |
| id | ntu-10356/142156 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T02:35:48Z |
| publishDate | 2020 |
| record_format | dspace |
| spelling | ntu-10356/1421562020-06-16T08:30:15Z 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI Liu, Wenjuan He, Leming Wang, Xubo Zhou, Jia Xu, Weijiang Smagin, Nikolay Toubal, Malika Yu, Hao Gu, Yuandong Xu, Jinghui Remiens, Denis Ren, Junyan School of Electrical and Electronic Engineering Institute of Microelectronics, A*STAR Engineering::Electrical and electronic engineering PMUT 3D FEM This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems. ASTAR (Agency for Sci., Tech. and Research, S’pore) Published version 2020-06-16T08:30:15Z 2020-06-16T08:30:15Z 2019 Journal Article Liu, W., He, L., Wang, X., Zhou, J., Xu, W., Smagin, N., . . . Ren, J. (2019). 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI. Sensors, 19(20), 4450-. doi:10.3390/s19204450 1424-8220 https://hdl.handle.net/10356/142156 10.3390/s19204450 31615076 2-s2.0-85073438818 20 19 en Sensors © 2019 The Authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). application/pdf |
| spellingShingle | Engineering::Electrical and electronic engineering PMUT 3D FEM Liu, Wenjuan He, Leming Wang, Xubo Zhou, Jia Xu, Weijiang Smagin, Nikolay Toubal, Malika Yu, Hao Gu, Yuandong Xu, Jinghui Remiens, Denis Ren, Junyan 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title | 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title_full | 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title_fullStr | 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title_full_unstemmed | 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title_short | 3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI |
| title_sort | 3d fem analysis of high frequency aln based pmut arrays on cavity soi |
| topic | Engineering::Electrical and electronic engineering PMUT 3D FEM |
| url | https://hdl.handle.net/10356/142156 |
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