3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI

3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched...

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Bibliographic Details
Main Authors: Liu, Wenjuan, He, Leming, Wang, Xubo, Zhou, Jia, Xu, Weijiang, Smagin, Nikolay, Toubal, Malika, Yu, Hao, Gu, Yuandong, Xu, Jinghui, Remiens, Denis, Ren, Junyan
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Engineering::Electrical and electronic engineering
PMUT
3D FEM
Online Access:https://hdl.handle.net/10356/142156

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