On-chip mid-infrared thermal emitter for filter-free gas sensing
Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recogniz...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2020
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| Online Access: | https://hdl.handle.net/10356/142462 |
| _version_ | 1811685007823994880 |
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| author | Ma, Yixuan |
| author2 | Luo Yu |
| author_facet | Luo Yu Ma, Yixuan |
| author_sort | Ma, Yixuan |
| collection | NTU |
| description | Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor.
With changing dimension and shape of metamaterial resonator, different gases can be recognized from gas mixture separately. By testing metamaterials with different shapes, the conclusion is concluded that cross-shaped resonator is the most suitable one for filtering with high quality factor. With adjusting the cross-shaped material unit cell, it can detect many gases with resonance peak in mid-IR region.
One of the applications of this metamaterial integrated gas sensor is detecting vehicle emission gases. With smaller volume and cheaper price, it still has great research value. |
| first_indexed | 2024-10-01T04:37:41Z |
| format | Thesis-Master by Coursework |
| id | ntu-10356/142462 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T04:37:41Z |
| publishDate | 2020 |
| publisher | Nanyang Technological University |
| record_format | dspace |
| spelling | ntu-10356/1424622023-07-04T16:46:52Z On-chip mid-infrared thermal emitter for filter-free gas sensing Ma, Yixuan Luo Yu School of Electrical and Electronic Engineering luoyu@ntu.edu.sg Engineering::Electrical and electronic engineering Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recognized from gas mixture separately. By testing metamaterials with different shapes, the conclusion is concluded that cross-shaped resonator is the most suitable one for filtering with high quality factor. With adjusting the cross-shaped material unit cell, it can detect many gases with resonance peak in mid-IR region. One of the applications of this metamaterial integrated gas sensor is detecting vehicle emission gases. With smaller volume and cheaper price, it still has great research value. Master of Science (Electronics) 2020-06-22T07:25:31Z 2020-06-22T07:25:31Z 2020 Thesis-Master by Coursework https://hdl.handle.net/10356/142462 en application/pdf Nanyang Technological University |
| spellingShingle | Engineering::Electrical and electronic engineering Ma, Yixuan On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title | On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title_full | On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title_fullStr | On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title_full_unstemmed | On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title_short | On-chip mid-infrared thermal emitter for filter-free gas sensing |
| title_sort | on chip mid infrared thermal emitter for filter free gas sensing |
| topic | Engineering::Electrical and electronic engineering |
| url | https://hdl.handle.net/10356/142462 |
| work_keys_str_mv | AT mayixuan onchipmidinfraredthermalemitterforfilterfreegassensing |