On-chip mid-infrared thermal emitter for filter-free gas sensing
Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recogniz...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2020
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| Online Access: | https://hdl.handle.net/10356/142462 |