Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy
This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion whic...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/142651 |
| _version_ | 1826129057798946816 |
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| author | Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin |
| author_sort | Muttikulangara, Sanathanan Swaminathan |
| collection | NTU |
| description | This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion which is difficult to attain with classical actuation like comb-drive design that depends on the structural resonant frequency. The micro-motor design is based on flexure mechanism to avoid frictional effects and getting the maximum angular stroke. The diffraction grating is fabricated separately by replication technique on a photosensitive material, SU-8 which becomes hard when it is cured. Finally, the replicated diffraction grating is bonded to the micro-actuator using UV-curable glue. |
| first_indexed | 2024-10-01T07:34:32Z |
| format | Conference Paper |
| id | ntu-10356/142651 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T07:34:32Z |
| publishDate | 2020 |
| record_format | dspace |
| spelling | ntu-10356/1426512020-06-26T03:24:50Z Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin School of Mechanical and Aerospace Engineering 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) Engineering::Mechanical engineering Diffraction Gratings Diffraction This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion which is difficult to attain with classical actuation like comb-drive design that depends on the structural resonant frequency. The micro-motor design is based on flexure mechanism to avoid frictional effects and getting the maximum angular stroke. The diffraction grating is fabricated separately by replication technique on a photosensitive material, SU-8 which becomes hard when it is cured. Finally, the replicated diffraction grating is bonded to the micro-actuator using UV-curable glue. NRF (Natl Research Foundation, S’pore) EDB (Economic Devt. Board, S’pore) 2020-06-26T03:24:49Z 2020-06-26T03:24:49Z 2018 Conference Paper Muttikulangara, S. S., Baranski, M., Rehman, S., Hu, L., & Miao, J. (2018). Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy. Proceedings of 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), 696-699. doi:10.1109/MEMSYS.2018.8346650 978-1-5386-4783-7 https://hdl.handle.net/10356/142651 10.1109/MEMSYS.2018.8346650 2-s2.0-85047007438 696 699 en © 2018 IEEE. All rights reserved. |
| spellingShingle | Engineering::Mechanical engineering Diffraction Gratings Diffraction Muttikulangara, Sanathanan Swaminathan Baranski, Maciej Rehman, Shakil Hu, Liangxing Miao, Jianmin Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title | Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title_full | Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title_fullStr | Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title_full_unstemmed | Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title_short | Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| title_sort | diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy |
| topic | Engineering::Mechanical engineering Diffraction Gratings Diffraction |
| url | https://hdl.handle.net/10356/142651 |
| work_keys_str_mv | AT muttikulangarasanathananswaminathan diffractiongratingintegratedonmicromachinedsteppermotorfordiversityimplementationinimagingspectroscopy AT baranskimaciej diffractiongratingintegratedonmicromachinedsteppermotorfordiversityimplementationinimagingspectroscopy AT rehmanshakil diffractiongratingintegratedonmicromachinedsteppermotorfordiversityimplementationinimagingspectroscopy AT huliangxing diffractiongratingintegratedonmicromachinedsteppermotorfordiversityimplementationinimagingspectroscopy AT miaojianmin diffractiongratingintegratedonmicromachinedsteppermotorfordiversityimplementationinimagingspectroscopy |