Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion whic...

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Bibliographic Details
Main Authors: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference Paper
Language:English
Published: 2020
Subjects:
Engineering::Mechanical engineering
Diffraction Gratings
Diffraction
Online Access:https://hdl.handle.net/10356/142651

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