Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit
Wearable pressure sensors with high sensitivity, broad dynamic response range, and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsilox...
| Main Authors: | , , , , , , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/143256 |
| _version_ | 1826129009709154304 |
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| author | Chen, Ming Li, Kun Cheng, Guanming He, Ke Li, Weiwei Zhang, Daoshu Li, Weimin Feng, Ye Wei, Lei Li, Wenjie Zhong, Guohua Yang, Chunlei |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Chen, Ming Li, Kun Cheng, Guanming He, Ke Li, Weiwei Zhang, Daoshu Li, Weimin Feng, Ye Wei, Lei Li, Wenjie Zhong, Guohua Yang, Chunlei |
| author_sort | Chen, Ming |
| collection | NTU |
| description | Wearable pressure sensors with high sensitivity, broad dynamic response range, and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsiloxane (PDMS)/Ag and rough polyimide/Au interdigital electrodes. By tailoring the touchpoints, the resulting pressure sensors show ultrahigh sensitivity (259.32 kPa–1 in the range of 0–2.5 kPa), broad dynamic response range (0–54 kPa), fast response (∼200 μs), and low detection limit (0.36 Pa). Furthermore, the effect of different sensor structural configurations, PDMS geometrical feature, and Ag thickness on the performance of the pressure sensors are systematically investigated. Thanks to these merits, the fabricated pressure sensor is capable of real-time monitoring pulse wave and can act as artificial skin for robot hand to detect weak pressure changes, leading to the great application promise in the fields of biomedical, real-time health monitoring, and intelligent robot. |
| first_indexed | 2024-10-01T07:34:12Z |
| format | Journal Article |
| id | ntu-10356/143256 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T07:34:12Z |
| publishDate | 2020 |
| record_format | dspace |
| spelling | ntu-10356/1432562020-08-17T04:58:19Z Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit Chen, Ming Li, Kun Cheng, Guanming He, Ke Li, Weiwei Zhang, Daoshu Li, Weimin Feng, Ye Wei, Lei Li, Wenjie Zhong, Guohua Yang, Chunlei School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Piezoresistive Wearable Pressure Sensors Wearable pressure sensors with high sensitivity, broad dynamic response range, and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsiloxane (PDMS)/Ag and rough polyimide/Au interdigital electrodes. By tailoring the touchpoints, the resulting pressure sensors show ultrahigh sensitivity (259.32 kPa–1 in the range of 0–2.5 kPa), broad dynamic response range (0–54 kPa), fast response (∼200 μs), and low detection limit (0.36 Pa). Furthermore, the effect of different sensor structural configurations, PDMS geometrical feature, and Ag thickness on the performance of the pressure sensors are systematically investigated. Thanks to these merits, the fabricated pressure sensor is capable of real-time monitoring pulse wave and can act as artificial skin for robot hand to detect weak pressure changes, leading to the great application promise in the fields of biomedical, real-time health monitoring, and intelligent robot. Ministry of Education (MOE) Nanyang Technological University Accepted version This work was supported in part by the Shenzhen Basic Research Grant: JCYJ20150925163313898, JCYJ20170413153246713, the National Nature Science Foundation of China: 11804354, 61574157, 61774164. This work was supported in part by the Singapore Ministry of Education Academic Research Fund Tier 2 (MOE2015-T2-1- 066 and MOE2015-T2-2-010), Singapore Ministry of Education Academic Research Fund Tier 1 (RG85/16), and Nanyang Technological University (start-up grant M4081515: L.W.). 2020-08-17T04:58:19Z 2020-08-17T04:58:19Z 2018 Journal Article Chen, M., Li, K., Cheng, G., He, K., Li, W., Zhang, D., ... Yang, C. (2019). Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit. ACS Applied Materials & Interfaces, 11(2), 2551-2558. doi:10.1021/acsami.8b20284 1944-8244 https://hdl.handle.net/10356/143256 10.1021/acsami.8b20284 30576104 2-s2.0-85059803323 2 11 2551 2558 en MOE2015-T2-1- 066 MOE2015-T2-2-010 RG85/16 start-up grant M4081515: L.W ACS Applied Materials & Interfaces This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Applied Materials & Interfaces, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acsami.8b20284 application/pdf |
| spellingShingle | Engineering::Electrical and electronic engineering Piezoresistive Wearable Pressure Sensors Chen, Ming Li, Kun Cheng, Guanming He, Ke Li, Weiwei Zhang, Daoshu Li, Weimin Feng, Ye Wei, Lei Li, Wenjie Zhong, Guohua Yang, Chunlei Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title | Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title_full | Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title_fullStr | Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title_full_unstemmed | Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title_short | Touchpoint-tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| title_sort | touchpoint tailored ultrasensitive piezoresistive pressure sensors with a broad dynamic response range and low detection limit |
| topic | Engineering::Electrical and electronic engineering Piezoresistive Wearable Pressure Sensors |
| url | https://hdl.handle.net/10356/143256 |
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