Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates

Flexible piezoresistive pressure sensors featuring high sensitivity, wide operating pressure range, and short response time are required urgently due to the rapid development of smart devices and artificial intelligence. Herein, a high-performance flexible piezoresistive pressure sensor based on nat...

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Main Authors: Li, Weiwei, He, Ke, Zhang, Daoshu, Li, Nianci, Hou, Yuxin, Cheng, Guanming, Li, Weimin, Sui, Fan, Dai, Yang, Luo, Hailin, Feng, Ye, Wei, Lei, Li, Wenjie, Zhong, Guohua, Chen, Ming, Yang, Chunlei
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/144397
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author Li, Weiwei
He, Ke
Zhang, Daoshu
Li, Nianci
Hou, Yuxin
Cheng, Guanming
Li, Weimin
Sui, Fan
Dai, Yang
Luo, Hailin
Feng, Ye
Wei, Lei
Li, Wenjie
Zhong, Guohua
Chen, Ming
Yang, Chunlei
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Li, Weiwei
He, Ke
Zhang, Daoshu
Li, Nianci
Hou, Yuxin
Cheng, Guanming
Li, Weimin
Sui, Fan
Dai, Yang
Luo, Hailin
Feng, Ye
Wei, Lei
Li, Wenjie
Zhong, Guohua
Chen, Ming
Yang, Chunlei
author_sort Li, Weiwei
collection NTU
description Flexible piezoresistive pressure sensors featuring high sensitivity, wide operating pressure range, and short response time are required urgently due to the rapid development of smart devices and artificial intelligence. Herein, a high-performance flexible piezoresistive pressure sensor based on naturally formed hierarchical flower-shaped SnSe2 nanoplates and conical frustum-like structured polydimethylsiloxane (PDMS) is demonstrated. The micropatterned PDMS/Au and SnSe2 nanoplates/Au interdigital electrodes are exploited as the top and down part of the sensor, respectively. Benefiting from abundant contact sites and sufficient roughness provided by the SnSe2 nanoplates, the proposed sensing devices exhibit significantly enhanced sensitivity as high as 433.22 kPa–1 when compared with conventional configuration (planar Au film as the bottom interdigital electrodes). The resulting pressure sensor (PDMS/Au/Au/SnSe2) also presents wide operating pressure range (0–38.4 kPa), lower limit of detection (∼0.82 Pa), fast response time (∼90 μs), and long-term cycle stability (>4000 cycles). Therefore, it shows a great potential in various applications, such as the detection of the magnitude and distribution of the loaded pressure, as well as the monitoring of the human physiological signals.
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spelling ntu-10356/1443972020-11-03T05:12:57Z Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates Li, Weiwei He, Ke Zhang, Daoshu Li, Nianci Hou, Yuxin Cheng, Guanming Li, Weimin Sui, Fan Dai, Yang Luo, Hailin Feng, Ye Wei, Lei Li, Wenjie Zhong, Guohua Chen, Ming Yang, Chunlei School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Sensitivity Response Time Flexible piezoresistive pressure sensors featuring high sensitivity, wide operating pressure range, and short response time are required urgently due to the rapid development of smart devices and artificial intelligence. Herein, a high-performance flexible piezoresistive pressure sensor based on naturally formed hierarchical flower-shaped SnSe2 nanoplates and conical frustum-like structured polydimethylsiloxane (PDMS) is demonstrated. The micropatterned PDMS/Au and SnSe2 nanoplates/Au interdigital electrodes are exploited as the top and down part of the sensor, respectively. Benefiting from abundant contact sites and sufficient roughness provided by the SnSe2 nanoplates, the proposed sensing devices exhibit significantly enhanced sensitivity as high as 433.22 kPa–1 when compared with conventional configuration (planar Au film as the bottom interdigital electrodes). The resulting pressure sensor (PDMS/Au/Au/SnSe2) also presents wide operating pressure range (0–38.4 kPa), lower limit of detection (∼0.82 Pa), fast response time (∼90 μs), and long-term cycle stability (>4000 cycles). Therefore, it shows a great potential in various applications, such as the detection of the magnitude and distribution of the loaded pressure, as well as the monitoring of the human physiological signals. Ministry of Education (MOE) Nanyang Technological University Accepted version This work was partially supported by the Shenzhen Basic Research Grant (JCYJ20150925163313898, JCYJ20170413153246713, and JCYJ20180507182431967) and the National Nature Science Foundation of China (11804354, 61574157, and 61774164). The authors are also grateful for the support of the Singapore Ministry of Education Academic Research Fund Tier 2 (MOE2015-T2-1-066 and MOE2015-T2-2-010), Singapore Ministry of Education Academic Research Fund Tier 1 (RG85/16), and Nanyang Technological University (Start-up grant M4081515 to L.W.). 2020-11-03T05:12:56Z 2020-11-03T05:12:56Z 2019 Journal Article Li, W., He, K., Zhang, D., Li, N., Hou, Y., Cheng, G., . . . Yang, C. (2019). Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates. ACS Applied Energy Materials, 2(4), 2803-2809. doi:10.1021/acsaem.9b00147 2574-0962 https://hdl.handle.net/10356/144397 10.1021/acsaem.9b00147 4 2 2803 2809 en ACS Applied Energy Materials This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Applied Energy Materials, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acsaem.9b00147 application/pdf
spellingShingle Engineering::Electrical and electronic engineering
Sensitivity
Response Time
Li, Weiwei
He, Ke
Zhang, Daoshu
Li, Nianci
Hou, Yuxin
Cheng, Guanming
Li, Weimin
Sui, Fan
Dai, Yang
Luo, Hailin
Feng, Ye
Wei, Lei
Li, Wenjie
Zhong, Guohua
Chen, Ming
Yang, Chunlei
Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title_full Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title_fullStr Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title_full_unstemmed Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title_short Flexible and high performance piezoresistive pressure sensors based on hierarchical flower-shaped SnSe2 nanoplates
title_sort flexible and high performance piezoresistive pressure sensors based on hierarchical flower shaped snse2 nanoplates
topic Engineering::Electrical and electronic engineering
Sensitivity
Response Time
url https://hdl.handle.net/10356/144397
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