Investigation of metal/metal oxide self-assembled nanoclusters in diamond-like carbon films
In this project, several sets of metal and metal oxide containing diamond like carbon films were successfully deposited by using an FCVA system from metal/carbon composite targets. A systematical investigation of such films has been carried out. The metal composition in all a-C:Me films increased...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Research Report |
| Language: | English |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/14527 |