Monolithic Germanium-tin pedestal waveguide for mid-infrared applications

Germanium-tin (GeSn) is a CMOS-compatible group-IV material. Its growth, however, is plagued by the tendency of Sn segregation and the generation of defects within the GeSn layer when it is grown on the lattice-mismatched substrate. Thus far, thin GeSn has been reported for use in a direct-band gap...

Full description

Bibliographic Details
Main Authors: Goh, Simon Chun Kiat, Shiau, Li Lynn, Zhang, Lin, Son, Bongkwon, Chen, Qimiao, Zhong, Jian, Salim, Teddy, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2021
Subjects:
Online Access:https://hdl.handle.net/10356/146749
_version_ 1811689882711490560
author Goh, Simon Chun Kiat
Shiau, Li Lynn
Zhang, Lin
Son, Bongkwon
Chen, Qimiao
Zhong, Jian
Salim, Teddy
Tan, Chuan Seng
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Goh, Simon Chun Kiat
Shiau, Li Lynn
Zhang, Lin
Son, Bongkwon
Chen, Qimiao
Zhong, Jian
Salim, Teddy
Tan, Chuan Seng
author_sort Goh, Simon Chun Kiat
collection NTU
description Germanium-tin (GeSn) is a CMOS-compatible group-IV material. Its growth, however, is plagued by the tendency of Sn segregation and the generation of defects within the GeSn layer when it is grown on the lattice-mismatched substrate. Thus far, thin GeSn has been reported for use in a direct-band gap for near-mid infrared light source and photodetector. In this communication, we report the growth of high quality single-crystalline GeSn (∼ 1 μm) with low compressive stress (−0.3%) and low defects (3 × 10 7 /cm 2 ) on Ge buffer on Si substrate. The as-grown GeSn is then fabricated into pedestal waveguide of width 1.25 μm. An estimated propagation loss of 1.81 dB/cm and bending loss of 0.19 dB/ bend are measured at 3.74 μm. In the absence of Ge-O absorption peaks at 820 and 550 cm −1 , under optimal fabrication and measurement condition, the proposed GeSn waveguide might possibly support light propagation for wavelength beyond 25 μm.
first_indexed 2024-10-01T05:55:10Z
format Journal Article
id ntu-10356/146749
institution Nanyang Technological University
language English
last_indexed 2024-10-01T05:55:10Z
publishDate 2021
record_format dspace
spelling ntu-10356/1467492021-03-09T06:23:00Z Monolithic Germanium-tin pedestal waveguide for mid-infrared applications Goh, Simon Chun Kiat Shiau, Li Lynn Zhang, Lin Son, Bongkwon Chen, Qimiao Zhong, Jian Salim, Teddy Tan, Chuan Seng School of Electrical and Electronic Engineering School of Materials Science and Engineering Temasek Laboratories @ NTU Engineering::Electrical and electronic engineering::Semiconductors Group IV Photonics Germanium-tin (GeSn) is a CMOS-compatible group-IV material. Its growth, however, is plagued by the tendency of Sn segregation and the generation of defects within the GeSn layer when it is grown on the lattice-mismatched substrate. Thus far, thin GeSn has been reported for use in a direct-band gap for near-mid infrared light source and photodetector. In this communication, we report the growth of high quality single-crystalline GeSn (∼ 1 μm) with low compressive stress (−0.3%) and low defects (3 × 10 7 /cm 2 ) on Ge buffer on Si substrate. The as-grown GeSn is then fabricated into pedestal waveguide of width 1.25 μm. An estimated propagation loss of 1.81 dB/cm and bending loss of 0.19 dB/ bend are measured at 3.74 μm. In the absence of Ge-O absorption peaks at 820 and 550 cm −1 , under optimal fabrication and measurement condition, the proposed GeSn waveguide might possibly support light propagation for wavelength beyond 25 μm. National Research Foundation (NRF) Published version This research project is supported by the National Research Foundation, Singapore, under its Competitive Research Program (CRP Award NRF-CRP19-2017-01). 2021-03-09T06:19:06Z 2021-03-09T06:19:06Z 2021 Journal Article Goh, S. C. K., Shiau, L. L., Zhang, L., Son, B., Chen, Q., Zhong, J., ... Tan, C. S. (2021). Monolithic Germanium-tin pedestal waveguide for mid-infrared applications. IEEE Photonics Journal, 13(2), 1-11. doi:10.1109/JPHOT.2021.3059452 1943-0655 https://hdl.handle.net/10356/146749 10.1109/JPHOT.2021.3059452 2-s2.0-85100934335 2 13 1 11 en IEEE Photonics Journal © 2021 IEEE. This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. All articles accepted after 12 June 2019 are published under a CC BY 4.0 license, and the author retains copyright. Users are allowed to read, download, copy, distribute, print, search, or link to the full texts of the articles, or use them for any other lawful purpose, as long as proper attribution is given. application/pdf
spellingShingle Engineering::Electrical and electronic engineering::Semiconductors
Group IV
Photonics
Goh, Simon Chun Kiat
Shiau, Li Lynn
Zhang, Lin
Son, Bongkwon
Chen, Qimiao
Zhong, Jian
Salim, Teddy
Tan, Chuan Seng
Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title_full Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title_fullStr Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title_full_unstemmed Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title_short Monolithic Germanium-tin pedestal waveguide for mid-infrared applications
title_sort monolithic germanium tin pedestal waveguide for mid infrared applications
topic Engineering::Electrical and electronic engineering::Semiconductors
Group IV
Photonics
url https://hdl.handle.net/10356/146749
work_keys_str_mv AT gohsimonchunkiat monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT shiaulilynn monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT zhanglin monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT sonbongkwon monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT chenqimiao monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT zhongjian monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT salimteddy monolithicgermaniumtinpedestalwaveguideformidinfraredapplications
AT tanchuanseng monolithicgermaniumtinpedestalwaveguideformidinfraredapplications