Formation of 45◦ silicon (110) surface using Triton X-n surfactants in potassium hydroxide for infrared applications

Formation of 45◦ silicon (110) surface using Triton X-n surfactants in potassium hydroxide for infrared applications

Silicon (Si) micromirrors are an integral feature for many micro-optomechanical systems (MOEMS). Such mirrors are generally wet etched in alkaline solution at elevated temperature. For 90 beam steering applications, 45 slanted Si (110) plane is the prime choice fabricated with the incorporation of...

Full description

Bibliographic Details
Main Authors: Goh, Simon Chun Kiat, Guo, Tina Xin, Chuan, KaiLiang, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2021
Subjects:
Engineering::Electrical and electronic engineering
Triton X-n
Silicon Micromirrors
Online Access:https://hdl.handle.net/10356/147326

Similar Items

Similar Items