Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thickne...

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Bibliographic Details
Main Authors: Zhang, Zhejuan, Shakerzadeh, Maziar, Tay, Beng Kang, Li, Xiaocheng, Tan, Chong Wei, Lin, LiFeng, Guo, Pingsheng, Feng, Tao, Sun, Zhuo
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2021
Subjects:
Engineering::Electrical and electronic engineering
Cooper Catalyst
Aligned Carbon Nanotubes
Online Access:https://hdl.handle.net/10356/151176

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