Enhancing the piezoelectric modulus of wurtzite AlN by ion beam strain engineering

Enhancing the piezoelectric modulus of wurtzite AlN by ion beam strain engineering

The piezoelectric modulus of wurtzite aluminum nitride (AlN) is a critical material parameter for electrical components, ultimately contributing to the energy efficiency and achievable bandwidth of modern communication devices. Here, we demonstrate that the introduction of metallic point-defects (Ti...

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Bibliographic Details
Main Authors: Fiedler, Holger, Leveneur, Jérôme, Mitchell, David R. G., Arulkumaran, Subramaniam, Ng, Geok Ing, Alphones, Arokiaswami, Kennedy, John
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2021
Subjects:
Engineering::Electrical and electronic engineering
Aluminum Nitride
Energy Efficiency
Online Access:https://hdl.handle.net/10356/153531

Internet

https://hdl.handle.net/10356/153531

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