Enhancing the piezoelectric modulus of wurtzite AlN by ion beam strain engineering
The piezoelectric modulus of wurtzite aluminum nitride (AlN) is a critical material parameter for electrical components, ultimately contributing to the energy efficiency and achievable bandwidth of modern communication devices. Here, we demonstrate that the introduction of metallic point-defects (Ti...
Asıl Yazarlar: | , , , , , , |
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Diğer Yazarlar: | |
Materyal Türü: | Journal Article |
Dil: | English |
Baskı/Yayın Bilgisi: |
2021
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Konular: | |
Online Erişim: | https://hdl.handle.net/10356/153531 |