Hierarchical aggregation/disaggregation for adaptive abstraction-level conversion in digital twin-based smart semiconductor manufacturing
In smart manufacturing, engineers typically analyze unexpected real-time problems using digitally cloned discrete-event (DE) models for wafer fabrication. To achieve a faster response to problems, it is essential to increase the speed of DE simulations because making optimal decisions for addressing...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2022
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/154073 |