Nanolithography for neuromorphic computing
The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of de...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/156901 |
| _version_ | 1826120635570454528 |
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| author | Soh, Wei Liang |
| author2 | S.N. Piramanayagam |
| author_facet | S.N. Piramanayagam Soh, Wei Liang |
| author_sort | Soh, Wei Liang |
| collection | NTU |
| description | The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of devices, and any possible improvements to these components for better results. |
| first_indexed | 2024-10-01T05:20:00Z |
| format | Final Year Project (FYP) |
| id | ntu-10356/156901 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:20:00Z |
| publishDate | 2022 |
| publisher | Nanyang Technological University |
| record_format | dspace |
| spelling | ntu-10356/1569012023-02-28T23:14:42Z Nanolithography for neuromorphic computing Soh, Wei Liang S.N. Piramanayagam School of Physical and Mathematical Sciences prem@ntu.edu.sg Science::Physics::Atomic physics::Solid state physics The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of devices, and any possible improvements to these components for better results. Bachelor of Science in Applied Physics 2022-04-27T06:29:31Z 2022-04-27T06:29:31Z 2022 Final Year Project (FYP) Soh, W. L. (2022). Nanolithography for neuromorphic computing. Final Year Project (FYP), Nanyang Technological University, Singapore. https://hdl.handle.net/10356/156901 https://hdl.handle.net/10356/156901 en application/pdf Nanyang Technological University |
| spellingShingle | Science::Physics::Atomic physics::Solid state physics Soh, Wei Liang Nanolithography for neuromorphic computing |
| title | Nanolithography for neuromorphic computing |
| title_full | Nanolithography for neuromorphic computing |
| title_fullStr | Nanolithography for neuromorphic computing |
| title_full_unstemmed | Nanolithography for neuromorphic computing |
| title_short | Nanolithography for neuromorphic computing |
| title_sort | nanolithography for neuromorphic computing |
| topic | Science::Physics::Atomic physics::Solid state physics |
| url | https://hdl.handle.net/10356/156901 |
| work_keys_str_mv | AT sohweiliang nanolithographyforneuromorphiccomputing |