Merryanty. & Chuan, L. (2009). Study of reactive sputtering process in semiconductor manufacturing.
Chicago Style (17th ed.) CitationMerryanty. and Li Chuan. Study of Reactive Sputtering Process in Semiconductor Manufacturing. 2009.
MLA (9th ed.) CitationMerryanty. and Li Chuan. Study of Reactive Sputtering Process in Semiconductor Manufacturing. 2009.
Warning: These citations may not always be 100% accurate.