Advanced phase shifting algorithms: development and evaluation

Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been...

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Main Author: Chen, Yuchi
Other Authors: Qian Kemao
Format: Thesis-Doctor of Philosophy
Language:English
Published: Nanyang Technological University 2022
Subjects:
Online Access:https://hdl.handle.net/10356/159437
_version_ 1811679417896796160
author Chen, Yuchi
author2 Qian Kemao
author_facet Qian Kemao
Chen, Yuchi
author_sort Chen, Yuchi
collection NTU
description Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been developed; followed by numerous development and evaluation studies. However, these works are mainly for the kPSAs, and only few are for the uPSAs. Therefore, in this thesis, we focused on the following issues of the existing uPSAs, including (i) the unclear restrictions, (ii) the unoptimized accuracy, (iii) the unpredictable performance, and (iv) the unaccelerated speed; and proposed multiple novel uPSAs who have superior accuracy, fewer restrictions, better predictability and faster speed. Meanwhile, we also compared the uPSAs with the kPSAs to showcase the merits of both kPSAs and uPSAs; and proposed a good-performing and restriction-free hybrid kPSA-uPSA by combining the merits of both categories.
first_indexed 2024-10-01T03:08:50Z
format Thesis-Doctor of Philosophy
id ntu-10356/159437
institution Nanyang Technological University
language English
last_indexed 2024-10-01T03:08:50Z
publishDate 2022
publisher Nanyang Technological University
record_format dspace
spelling ntu-10356/1594372022-06-20T02:58:12Z Advanced phase shifting algorithms: development and evaluation Chen, Yuchi Qian Kemao School of Computer Science and Engineering MKMQian@ntu.edu.sg Engineering::Computer science and engineering Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been developed; followed by numerous development and evaluation studies. However, these works are mainly for the kPSAs, and only few are for the uPSAs. Therefore, in this thesis, we focused on the following issues of the existing uPSAs, including (i) the unclear restrictions, (ii) the unoptimized accuracy, (iii) the unpredictable performance, and (iv) the unaccelerated speed; and proposed multiple novel uPSAs who have superior accuracy, fewer restrictions, better predictability and faster speed. Meanwhile, we also compared the uPSAs with the kPSAs to showcase the merits of both kPSAs and uPSAs; and proposed a good-performing and restriction-free hybrid kPSA-uPSA by combining the merits of both categories. Doctor of Philosophy 2022-06-20T02:58:11Z 2022-06-20T02:58:11Z 2022 Thesis-Doctor of Philosophy Chen, Y. (2022). Advanced phase shifting algorithms: development and evaluation. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/159437 https://hdl.handle.net/10356/159437 en This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0). application/pdf Nanyang Technological University
spellingShingle Engineering::Computer science and engineering
Chen, Yuchi
Advanced phase shifting algorithms: development and evaluation
title Advanced phase shifting algorithms: development and evaluation
title_full Advanced phase shifting algorithms: development and evaluation
title_fullStr Advanced phase shifting algorithms: development and evaluation
title_full_unstemmed Advanced phase shifting algorithms: development and evaluation
title_short Advanced phase shifting algorithms: development and evaluation
title_sort advanced phase shifting algorithms development and evaluation
topic Engineering::Computer science and engineering
url https://hdl.handle.net/10356/159437
work_keys_str_mv AT chenyuchi advancedphaseshiftingalgorithmsdevelopmentandevaluation