A novel technique to fabricate magnetic polydimethylsiloxane micropillar

In past decades, polymeric micropillars have been employed in many complex functional micro-devices, such as micro-fluids, micro-sensors, tunable wetting surfaces, and substrate structures. This paper presents a novel technique to fabricate high-aspect-ratio magnetic polydimethylsiloxane (PDMS) micr...

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Main Authors: Yang, Xiaoming, Zhong, Zhao Wei
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2022
Subjects:
Online Access:https://hdl.handle.net/10356/159527
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author Yang, Xiaoming
Zhong, Zhao Wei
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Yang, Xiaoming
Zhong, Zhao Wei
author_sort Yang, Xiaoming
collection NTU
description In past decades, polymeric micropillars have been employed in many complex functional micro-devices, such as micro-fluids, micro-sensors, tunable wetting surfaces, and substrate structures. This paper presents a novel technique to fabricate high-aspect-ratio magnetic polydimethylsiloxane (PDMS) micropillars that can move under gradient magnetic fields. First, a drop of Fe3O4 superparamagnetic nanoparticles was dispersed in acetone solution, sonicated, and poured over a pre-etch silicon mold with deep micro-holes. Second, we quickly attracted Fe3O4 nanoparticles in micro-holes with a strong permanent magnet at the silicon mold's backside. Third, we used a soft lithography process to force the PDMS liquid to flow into the micro-holes by sequencing the air in a vacuum chamber, baked in a hot plate, and then peeled off in ethanol solution and dried in a CO2 dryer machine. The diameters of PDMS magnetic micropillars were from 1 μm, 2 μm to 10 μm, and the heights were 30 μm and 50 μm. We observed 1 μm micropillar with 50 aspect ratio could deflect its end up to 12 μm under a gradient magnetic field of 5 mT/mm. The magnetic micropillar end movement in an ethanol solution was validated, which broads the application to micro-fluidics and other liquid microdevices. The energy-dispersive X-ray spectroscopy also examined the iron percentage in PDMS micropillars. They were in a range of 42% to 81.4%; with the median value was 59.6% that is the highest value reported in the literature, to our best knowledge.
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spelling ntu-10356/1595272022-06-24T07:33:41Z A novel technique to fabricate magnetic polydimethylsiloxane micropillar Yang, Xiaoming Zhong, Zhao Wei School of Mechanical and Aerospace Engineering Engineering::Mechanical engineering Magnetism and Magnetic Properties Mechanical Properties In past decades, polymeric micropillars have been employed in many complex functional micro-devices, such as micro-fluids, micro-sensors, tunable wetting surfaces, and substrate structures. This paper presents a novel technique to fabricate high-aspect-ratio magnetic polydimethylsiloxane (PDMS) micropillars that can move under gradient magnetic fields. First, a drop of Fe3O4 superparamagnetic nanoparticles was dispersed in acetone solution, sonicated, and poured over a pre-etch silicon mold with deep micro-holes. Second, we quickly attracted Fe3O4 nanoparticles in micro-holes with a strong permanent magnet at the silicon mold's backside. Third, we used a soft lithography process to force the PDMS liquid to flow into the micro-holes by sequencing the air in a vacuum chamber, baked in a hot plate, and then peeled off in ethanol solution and dried in a CO2 dryer machine. The diameters of PDMS magnetic micropillars were from 1 μm, 2 μm to 10 μm, and the heights were 30 μm and 50 μm. We observed 1 μm micropillar with 50 aspect ratio could deflect its end up to 12 μm under a gradient magnetic field of 5 mT/mm. The magnetic micropillar end movement in an ethanol solution was validated, which broads the application to micro-fluidics and other liquid microdevices. The energy-dispersive X-ray spectroscopy also examined the iron percentage in PDMS micropillars. They were in a range of 42% to 81.4%; with the median value was 59.6% that is the highest value reported in the literature, to our best knowledge. 2022-06-24T07:33:41Z 2022-06-24T07:33:41Z 2021 Journal Article Yang, X. & Zhong, Z. W. (2021). A novel technique to fabricate magnetic polydimethylsiloxane micropillar. Journal of Applied Polymer Science, 138(20), 50460-. https://dx.doi.org/10.1002/app.50460 0021-8995 https://hdl.handle.net/10356/159527 10.1002/app.50460 2-s2.0-85099239327 20 138 50460 en Journal of Applied Polymer Science © 2021 Wiley Periodicals LLC. All rights reserved.
spellingShingle Engineering::Mechanical engineering
Magnetism and Magnetic Properties
Mechanical Properties
Yang, Xiaoming
Zhong, Zhao Wei
A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title_full A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title_fullStr A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title_full_unstemmed A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title_short A novel technique to fabricate magnetic polydimethylsiloxane micropillar
title_sort novel technique to fabricate magnetic polydimethylsiloxane micropillar
topic Engineering::Mechanical engineering
Magnetism and Magnetic Properties
Mechanical Properties
url https://hdl.handle.net/10356/159527
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