Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors
In the frontier resistive micro-nano gas sensors, the change rate reliability between the measured quantity and output signals has long been puzzled by the ineluctable device-to-device and run-to-run disparities. Here, a neotype sensing data interpretation method to circumvent these signal inconsist...
| Main Authors: | , , , , , , , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2022
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/159833 |
| _version_ | 1826129406155816960 |
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| author | Zhao, Yuxin Su, Yue Guo, Mengya Liu, Liqun Chen, Peng Song, Anqi Yu, Wei Hu, Shi Zhao, Rongjian Fang, Zhen Zhang, Huacheng Zhao, Yanli Liang, Wenjie |
| author2 | School of Physical and Mathematical Sciences |
| author_facet | School of Physical and Mathematical Sciences Zhao, Yuxin Su, Yue Guo, Mengya Liu, Liqun Chen, Peng Song, Anqi Yu, Wei Hu, Shi Zhao, Rongjian Fang, Zhen Zhang, Huacheng Zhao, Yanli Liang, Wenjie |
| author_sort | Zhao, Yuxin |
| collection | NTU |
| description | In the frontier resistive micro-nano gas sensors, the change rate reliability between the measured quantity and output signals has long been puzzled by the ineluctable device-to-device and run-to-run disparities. Here, a neotype sensing data interpretation method to circumvent these signal inconsistencies is reported. The method is based on discovery of a strong linear relation between the initial resistance in air (Ra ) and the absolute change in resistance after exposure to target gas (Ra -Rg ). Metal oxide gas sensors based on a micro-hot-plate are employed as the model system. The study finds that such correlation has a wide universality, even for devices incorporated with different sensing materials or under different gas atmosphere. Furthermore, this rule can also be extensible to graphene-based interdigital microelectrode. In situ probe scanning analyses illuminate that the linear dependence is closely related to work function matching level between metal electrode and sensitive layer. The Schottky barrier at metal-semiconductor junctions is the prominent parameter, whose height (ϕB ) can fundamentally impact material/electrode contact resistance, thereby further affecting the realistic nature expression of sensing materials. Using this correlation, a calibration procedure is proposed and embed in a fully integrated pocket-size sensor prototype, whose response outcomes demonstrated high credibility as compared to commercial apparatus. |
| first_indexed | 2024-10-01T07:40:04Z |
| format | Journal Article |
| id | ntu-10356/159833 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T07:40:04Z |
| publishDate | 2022 |
| record_format | dspace |
| spelling | ntu-10356/1598332022-07-04T05:24:09Z Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors Zhao, Yuxin Su, Yue Guo, Mengya Liu, Liqun Chen, Peng Song, Anqi Yu, Wei Hu, Shi Zhao, Rongjian Fang, Zhen Zhang, Huacheng Zhao, Yanli Liang, Wenjie School of Physical and Mathematical Sciences Science::Chemistry Micro Electro Mechanical Systems Schottky Contacts In the frontier resistive micro-nano gas sensors, the change rate reliability between the measured quantity and output signals has long been puzzled by the ineluctable device-to-device and run-to-run disparities. Here, a neotype sensing data interpretation method to circumvent these signal inconsistencies is reported. The method is based on discovery of a strong linear relation between the initial resistance in air (Ra ) and the absolute change in resistance after exposure to target gas (Ra -Rg ). Metal oxide gas sensors based on a micro-hot-plate are employed as the model system. The study finds that such correlation has a wide universality, even for devices incorporated with different sensing materials or under different gas atmosphere. Furthermore, this rule can also be extensible to graphene-based interdigital microelectrode. In situ probe scanning analyses illuminate that the linear dependence is closely related to work function matching level between metal electrode and sensitive layer. The Schottky barrier at metal-semiconductor junctions is the prominent parameter, whose height (ϕB ) can fundamentally impact material/electrode contact resistance, thereby further affecting the realistic nature expression of sensing materials. Using this correlation, a calibration procedure is proposed and embed in a fully integrated pocket-size sensor prototype, whose response outcomes demonstrated high credibility as compared to commercial apparatus. National Research Foundation (NRF) The authors gratefully acknowledge financial support from the National Key R&D Program of China (2016YFA0200800), the National Natural Science Foundation of China (62074123), the PetroChina Innovation Foundation (2019D-5007-0410), the Young Talent Support Plan of Xi’an Jiaotong University (7121191202), and the Singapore National Research Foundation Investigator ship (NRF-NRFI2018-03). 2022-07-04T05:24:09Z 2022-07-04T05:24:09Z 2021 Journal Article Zhao, Y., Su, Y., Guo, M., Liu, L., Chen, P., Song, A., Yu, W., Hu, S., Zhao, R., Fang, Z., Zhang, H., Zhao, Y. & Liang, W. (2021). Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors. Small Methods, 5(12), 2101194-. https://dx.doi.org/10.1002/smtd.202101194 2366-9608 https://hdl.handle.net/10356/159833 10.1002/smtd.202101194 34928009 2-s2.0-85118482373 12 5 2101194 en NRF-NRFI2018-03 Small Methods © 2021 Wiley-VCH GmbH. All rights reserved. |
| spellingShingle | Science::Chemistry Micro Electro Mechanical Systems Schottky Contacts Zhao, Yuxin Su, Yue Guo, Mengya Liu, Liqun Chen, Peng Song, Anqi Yu, Wei Hu, Shi Zhao, Rongjian Fang, Zhen Zhang, Huacheng Zhao, Yanli Liang, Wenjie Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title | Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title_full | Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title_fullStr | Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title_full_unstemmed | Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title_short | Schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro-nanosensors |
| title_sort | schottky contacts regularized linear regression for signal inconsistency circumvent in resistive gas micro nanosensors |
| topic | Science::Chemistry Micro Electro Mechanical Systems Schottky Contacts |
| url | https://hdl.handle.net/10356/159833 |
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