Adsorption and reaction mechanisms of direct palladium synthesis by ALD using Pd(hfac)₂ and ozone on Si (100) surface

Adsorption and reaction mechanisms of direct palladium synthesis by ALD using Pd(hfac)₂ and ozone on Si (100) surface

Palladium nanoparticles made by atomic layer deposition (ALD) normally involve formaldehyde or H2 as a reducing agent. Since formaldehyde is toxic and H2 is explosive, it is advantageous to remove this reducing step during the fabrication of palladium metal by ALD. In this work we have successfully...

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Bibliographic Details
Main Authors: Cheng, Chunyu, Zou, Yiming, Li, Jiahui, Ong, Amanda Jiamin, Goei, Ronn, Huang, Jingfeng, Li, Shuzhou, Tok, Alfred Iing Yoong
Other Authors: School of Materials Science and Engineering
Format: Journal Article
Language:English
Published: 2022
Subjects:
Engineering::Materials
Palladium
Ozone
Online Access:https://hdl.handle.net/10356/160884

Internet

https://hdl.handle.net/10356/160884

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