Fabrication of PtIrPd noble metal medium entropy alloy thin film by atomic layer deposition
Noble metal medium entropy alloy (MEA) thin films have recently attracted enormous research interests recently because of their great potential in the catalytic application. However, conventional bottom-up fabrication methods for MEA thin film such as magnetron sputtering face enormous challenges in...
| Main Authors: | , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2022
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/163868 |