Optimization of molybdenum electrode properties in ScAlN deposition process
The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film.
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| Andere auteurs: | |
| Formaat: | Thesis-Master by Coursework |
| Taal: | English |
| Gepubliceerd in: |
Nanyang Technological University
2023
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| Onderwerpen: | |
| Online toegang: | https://hdl.handle.net/10356/166171 |
| _version_ | 1826123942524354560 |
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| author | Pan, Ziran |
| author2 | Tay Beng Kang |
| author_facet | Tay Beng Kang Pan, Ziran |
| author_sort | Pan, Ziran |
| collection | NTU |
| description | The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film. |
| first_indexed | 2024-10-01T06:12:34Z |
| format | Thesis-Master by Coursework |
| id | ntu-10356/166171 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:12:34Z |
| publishDate | 2023 |
| publisher | Nanyang Technological University |
| record_format | dspace |
| spelling | ntu-10356/1661712023-04-16T05:19:47Z Optimization of molybdenum electrode properties in ScAlN deposition process Pan, Ziran Tay Beng Kang School of Electrical and Electronic Engineering EBKTAY@ntu.edu.sg Engineering::Electrical and electronic engineering The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film. Master of Science (Green Electronics) 2023-04-16T05:19:47Z 2023-04-16T05:19:47Z 2023 Thesis-Master by Coursework Pan, Z. (2023). Optimization of molybdenum electrode properties in ScAlN deposition process. Master's thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/166171 https://hdl.handle.net/10356/166171 en ISM-DISS-03709 application/pdf Nanyang Technological University |
| spellingShingle | Engineering::Electrical and electronic engineering Pan, Ziran Optimization of molybdenum electrode properties in ScAlN deposition process |
| title | Optimization of molybdenum electrode properties in ScAlN deposition process |
| title_full | Optimization of molybdenum electrode properties in ScAlN deposition process |
| title_fullStr | Optimization of molybdenum electrode properties in ScAlN deposition process |
| title_full_unstemmed | Optimization of molybdenum electrode properties in ScAlN deposition process |
| title_short | Optimization of molybdenum electrode properties in ScAlN deposition process |
| title_sort | optimization of molybdenum electrode properties in scaln deposition process |
| topic | Engineering::Electrical and electronic engineering |
| url | https://hdl.handle.net/10356/166171 |
| work_keys_str_mv | AT panziran optimizationofmolybdenumelectrodepropertiesinscalndepositionprocess |