Mitigation of corner polysilicon residues through nitride liner etch relocation
NAND flash memory has grown enormously and becomes the most popular non-volatile SSD (Solid State Drives). After 2D NAND reaches its limit, the 3D structure has become the mainstream of NAND. 3D NAND increases capacity in a given footprint without an excessive shrinking of the flash memory chips to...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2023
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| Online Access: | https://hdl.handle.net/10356/166578 |