Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing

Traditional metal oxide semiconductor (MOS) gas sensors have limited applications in wearable devices owing to their inflexibility and high-power consumption by substantial heat loss. To overcome these limitations, we prepared doped Si/SiO2 flexible fibers by a thermal drawing method as substrates t...

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Main Authors: Niu, Feng, Zhou, Fugong, Wang, Zhixun, Wei, Lei, Hu, Jie, Dong, Lei, Ma, Yifei, Wang, Mei, Jia, Suotang, Chen, Xuyuan, Tong, Zhaomin
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2023
Subjects:
Online Access:https://hdl.handle.net/10356/169246
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author Niu, Feng
Zhou, Fugong
Wang, Zhixun
Wei, Lei
Hu, Jie
Dong, Lei
Ma, Yifei
Wang, Mei
Jia, Suotang
Chen, Xuyuan
Tong, Zhaomin
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Niu, Feng
Zhou, Fugong
Wang, Zhixun
Wei, Lei
Hu, Jie
Dong, Lei
Ma, Yifei
Wang, Mei
Jia, Suotang
Chen, Xuyuan
Tong, Zhaomin
author_sort Niu, Feng
collection NTU
description Traditional metal oxide semiconductor (MOS) gas sensors have limited applications in wearable devices owing to their inflexibility and high-power consumption by substantial heat loss. To overcome these limitations, we prepared doped Si/SiO2 flexible fibers by a thermal drawing method as substrates to fabricate MOS gas sensors. A methane (CH4) gas sensor was demonstrated by subsequently in situ synthesizing Co-doped ZnO nanorods on the fiber surface. The doped Si core acted as the heating source through Joule heating, which conducted heat to the sensing material with reduced heat loss; the SiO2 cladding was an insulating substrate. The gas sensor was integrated into a miner cloth as a wearable device, and the concentration change of CH4 was monitored in real time through different colored light-emitting diodes. Our study demonstrated the feasibility of using doped Si/SiO2 fibers as the substrates to fabricate wearable MOS gas sensors, where the sensors have substantial advantages over tradition sensors in flexibility, heat utilization, etc.
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spelling ntu-10356/1692462023-07-14T15:39:31Z Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing Niu, Feng Zhou, Fugong Wang, Zhixun Wei, Lei Hu, Jie Dong, Lei Ma, Yifei Wang, Mei Jia, Suotang Chen, Xuyuan Tong, Zhaomin School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Flexible Fibers Gas Sensing Traditional metal oxide semiconductor (MOS) gas sensors have limited applications in wearable devices owing to their inflexibility and high-power consumption by substantial heat loss. To overcome these limitations, we prepared doped Si/SiO2 flexible fibers by a thermal drawing method as substrates to fabricate MOS gas sensors. A methane (CH4) gas sensor was demonstrated by subsequently in situ synthesizing Co-doped ZnO nanorods on the fiber surface. The doped Si core acted as the heating source through Joule heating, which conducted heat to the sensing material with reduced heat loss; the SiO2 cladding was an insulating substrate. The gas sensor was integrated into a miner cloth as a wearable device, and the concentration change of CH4 was monitored in real time through different colored light-emitting diodes. Our study demonstrated the feasibility of using doped Si/SiO2 fibers as the substrates to fabricate wearable MOS gas sensors, where the sensors have substantial advantages over tradition sensors in flexibility, heat utilization, etc. Published version This work was supported by the Key Research and Development Program of Shanxi Province (202102030201002), the Changjiang Scholars and Innovative Research Team in University of Ministry of Education of China (IRT_17R70), the State Key Program of National Natural Science of China (11434007), the 111 Project (D18001), and the Fund for Shanxi “1331 Project” Key Subjects Construction. 2023-07-10T05:37:55Z 2023-07-10T05:37:55Z 2023 Journal Article Niu, F., Zhou, F., Wang, Z., Wei, L., Hu, J., Dong, L., Ma, Y., Wang, M., Jia, S., Chen, X. & Tong, Z. (2023). Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing. Research, 6, 0100-. https://dx.doi.org/10.34133/research.0100 2096-5168 https://hdl.handle.net/10356/169246 10.34133/research.0100 37011282 2-s2.0-85152209197 6 0100 en Research © 2023 Feng Niu et al. Exclusive Licensee Science and Technology Review Publishing House. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution License (CC BY 4.0). application/pdf
spellingShingle Engineering::Electrical and electronic engineering
Flexible Fibers
Gas Sensing
Niu, Feng
Zhou, Fugong
Wang, Zhixun
Wei, Lei
Hu, Jie
Dong, Lei
Ma, Yifei
Wang, Mei
Jia, Suotang
Chen, Xuyuan
Tong, Zhaomin
Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title_full Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title_fullStr Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title_full_unstemmed Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title_short Synthesizing metal oxide semiconductors on doped Si/SiO₂ flexible fiber substrates for wearable gas sensing
title_sort synthesizing metal oxide semiconductors on doped si sio₂ flexible fiber substrates for wearable gas sensing
topic Engineering::Electrical and electronic engineering
Flexible Fibers
Gas Sensing
url https://hdl.handle.net/10356/169246
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