Effect of external magnetic field on the preparation of nitrogen-doped diamond-like carbon films
Nitrogen-doped diamond-like carbon (DLC) films were prepared on quartz substrates and silicon wafers using the radio-frequency magnetron sputtering technique with high-purity graphite as the target material. Simultaneously, a permanent NdFeB magnet was placed on the substrate site to study the effec...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2023
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/171709 |